2009
DOI: 10.1063/1.3132064
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Ultralow-power hydrogen sensing with single palladium nanowires

Abstract: Palladium nanowires were fabricated on silicon substrates using conventional microfabrication techniques. Sensors based on such nanowires show a reversible response to hydrogen concentrations as low as 27 ppm with response times varying from 5 s (H2 concentrations >20%) to 30 s (H2 concentrations <100 ppm) at room temperature. The response times can be reduced by increasing the applied bias due to resistive heating. The noise spectrum of the nanowires shows a 1/f behavior, sufficiently low to ena… Show more

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Cited by 152 publications
(167 citation statements)
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“…Because it is flammable between concentrations of 4% and 75% in air, safety sensors for leak detection are required. In recent years, a variety of sensor concepts has emerged such as resistivitybased [1,2], MOS-based [3,4], optical [5], cantilever-based [6] or nanogap-based sensors [7,8]. Most of these devices make use of palladium (Pd) as the sensitive material because of its highly catalytic surface and a large solubility of atomic hydrogen [9,10].…”
Section: Introductionmentioning
confidence: 99%
“…Because it is flammable between concentrations of 4% and 75% in air, safety sensors for leak detection are required. In recent years, a variety of sensor concepts has emerged such as resistivitybased [1,2], MOS-based [3,4], optical [5], cantilever-based [6] or nanogap-based sensors [7,8]. Most of these devices make use of palladium (Pd) as the sensitive material because of its highly catalytic surface and a large solubility of atomic hydrogen [9,10].…”
Section: Introductionmentioning
confidence: 99%
“…10 In the field of sensor devices, low-frequency noise measurements have been performed in order to gain information on their detection limit. 11,12 Moreover, this characterization technique is a promising candidate for selective gas sensing because of specific noise spectrum characteristics in the presence of different gas molecules. [13][14][15] Low-frequency conductance fluctuations of metal oxide nanowire transistors have been studied for the case of SnO 2 nanowires 16 and ZnO nanowires.…”
mentioning
confidence: 99%
“…This is in contrast to common H 2 sensors using bulk Pd, where the increased scattering of conducting electrons at absorbed interstitial H-atoms gives rise to an increase in electrical resistivity. [9][10][11] To optimize such sensors based on ultrathin Pd films, a precise understanding of the electric transport mechanisms and hydrogen sensing behavior as a function of the morphology is essential. The existence of distinct H 2 sensing behavior for continuous and entirely discontinuous Pd structures has been previously reported using various substrate materials such as HOPG, 8 Si, 12 SiO 2 , 5 Si 3 N 4 ͑Ref.…”
mentioning
confidence: 99%