2013
DOI: 10.1364/oe.21.029374
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Ultralow loss single layer submicron silicon waveguide crossing for SOI optical interconnect

Abstract: We demonstrate compact, broadband, ultralow loss silicon waveguide crossings operating at 1550 nm and 1310 nm. Cross-wafer measurement of 30 dies shows transmission insertion loss of - 0.028 ± 0.009 dB for the 1550 nm device and - 0.017 ± 0.005 dB for the 1310 nm device. Both crossings show crosstalk lower than - 37 dB. The devices were fabricated in a CMOS-compatible process using 248 nm optical lithography with a single etch step.

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Cited by 208 publications
(84 citation statements)
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“…In Si, compact, fully-etched waveguide crossings fabricated using photolithography (i.e., without subwavelength features) at best have an insertion loss in the range of 0.04-0.1 dB and a crosstalk of −35 dB in the C-band [31], and using genetic algorithms, an insertion loss better than 0.04 dB can be achieved over a bandwidth of about 45 nm and crosstalk can be improved to − 40 dB [32]. To reduce the insertion loss, the index contrast of the Si waveguides is lowered at the crossing by using the partially-etched level at the expense of a larger crossing size [33], [34]; losses as low as 0.015 dB per crossing have been predicted [34].…”
Section: Waveguide Crossingsmentioning
confidence: 99%
“…In Si, compact, fully-etched waveguide crossings fabricated using photolithography (i.e., without subwavelength features) at best have an insertion loss in the range of 0.04-0.1 dB and a crosstalk of −35 dB in the C-band [31], and using genetic algorithms, an insertion loss better than 0.04 dB can be achieved over a bandwidth of about 45 nm and crosstalk can be improved to − 40 dB [32]. To reduce the insertion loss, the index contrast of the Si waveguides is lowered at the crossing by using the partially-etched level at the expense of a larger crossing size [33], [34]; losses as low as 0.015 dB per crossing have been predicted [34].…”
Section: Waveguide Crossingsmentioning
confidence: 99%
“…Due to the high-index contrast of the silicon platform such as SOI, the insertion loss of a conventional waveguide crossing is around 0.15 dB. To reduce optical loss, waveguide crossing designed by using particle swarm optimization has been proposed and demonstrated, with a loss of −0.028 ± 0.009 dB for 1550 nm operating wavelength [40]. In this part, we introduce some waveguide crossing designs assisted by SWG structures.…”
Section: Waveguide Crossingsmentioning
confidence: 99%
“…1a is currently not included. We expect that adding the waveguide crossing should not affect the performance of the switch since progress in waveguide crossing designs has shown a very low crosstalk (lower than 37 dB in [17]). The microring is originally used as an add-drop filter, and the detailed device fabrication can be found in [3].…”
Section: Motivationmentioning
confidence: 99%