A plasma-irradiated poly(ethylene terephthalate) (PET) film has a long lifetime of bonding capability. To clarify its origin, a PET film was irradiated with oxygen plasma. It was then exposed to normal atmosphere including water vapor. FTIR absorption on the irradiated and non-irradiated films was measured at different times after the start of evacuation. The irradiated film has a larger amount of OH than the non irradiated film, and OH is generated on the film surface. The irradiated film has a larger amount of adsorbed water, because the surface is activated by the created OH. The adsorbed water is desorbed rapidly with increasing evacuation time in the non irradiated film, but it is desorbed more gradually in the irradiated film. Water has hydrogen bonds with OH; thus, the water desorption is suppressed. The OH absorption band is shifted to the lower wave number side owing to the hydrogen bonds. The irradiated surface may be protected by the water from the atmosphere.