Ultrahigh precision laser nanoprinting based on defect-compensated digital holography for fast-fabricating optical metalenses
Kaiwen Jie,
Zhuofan Yao,
Yiyin Zheng
et al.
Abstract:The 3D structured light field manipulated by a digital-micromirror-device (DMD)-based digital hologram has demonstrated its superiority in fast-fabricating stereo nanostructures. However, this technique intrinsically suffers from defects of light intensity in generating modulated focal spots, which prevents from achieving high-precision micro/nanodevices. In this Letter, we have demonstrated a compensation approach based on adapting spatial voxel density for fabricating optical metalenses with ultrahigh precis… Show more
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