Ultrahigh density InGaN/GaN nanopyramid quantum dots for visible emissions with high quantum efficiency
Cheng Liu,
Nikhil Pokharel,
Qinchen Lin
et al.
Abstract:In this study, the selective area epitaxy (SAE) of InGaN/GaN nanopyramid quantum dots (QDs) on a block copolymer patterned (BCP) GaN template using metalorganic chemical vapor deposition is reported. The pattern transfer process and SAE process are developed to enable a ultrahigh density of 7–9 × 1010 cm−2 QD formation with a feature size of 20–35 nm. The growth mechanism and geometrical properties of the QDs were investigated by scanning electron microscopy and cross-sectional transmission electron microscopy… Show more
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