Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source

Seaberg, Matthew D.; Adams, Daniel E.; Townsend, Ethan; Raymondson, Daisy; Schlotter, W. F.; Liu, Yanwei; Menoni, Carmen S.; Rong, Lü; Chen, Chien-Chun; Miao, Jianwei; Kapteyn, Henry C.; Murnane, Margaret M.

doi:10.1364/oe.19.022470

Cited by 153 publications

(99 citation statements)

References 45 publications

(35 reference statements)

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“…Because of these outstanding advantages, the PIE has attracted a great deal of attention in various research fields and is widely studied worldwide. [15][16][17][18] While having these outstanding advantages, the PIE also suffers from several clear shortcomings. The first problem is the time-consuming data acquisition process; for a typical mechanical scanningbased PIE experiment, the time required to record 10 × 10 diffraction pattern frames is always about 10 min, which leads to a fairly high requirement for the stability of the imaging system and working environment.…”

Section: Introductionmentioning

confidence: 99%

Ptychographic microscopy via wavelength scanning

et al. 2017

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A wavelength scanning Ptychographic Iterative Engine (ws-PIE) is proposed to reconstruct high-quality complex images of specimens. Compared with common ptychography, which required the user to transversely scan the sample during data acquisition, the ws-PIE fundamentally reduces the data acquisition time and can avoid the heavy dependence on the accuracy of the scanning mechanism. This method can be easily implemented in the field of material and biological science as the wavelength-swept laser source is currently commercially available. The feasibility of the ws-PIE is demonstrated numerically and experimentally.

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Section: Introductionmentioning

confidence: 99%

Ptychographic microscopy via wavelength scanning

et al. 2017

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“…employed for important achievements in diffraction imaging [7], high-resolution holography [8], among others.…”

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Spatial coherence measurements of the EUV emission from laser-plasma source based on xenon/helium gas puff target

et al. 2017

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employed for important achievements in diffraction imaging [7], high-resolution holography [8], among others.Among compact sources, there are also sources that use gas-type targets to produce laser-plasma-emitting short wavelength radiation. These sources are often referred to as sources based on gas jets [9]. Variations of those are double stream gas puff targets, which inject not one but two gasses into the interaction region. While the inner gas is called working gas, which is the material of the target, to which a specific elemental emission can be attributed, the other, outer gas surrounds the inner gas shaping its flow and increasing its density in the interaction region. Such source was already proven to be useful so far for various applications in metrology [10], full-field imaging [11], photoionization [12], polymer surface modification [13], radiobiology [14], etc. All those applications were related to the use of spatially incoherent EUV and SXR radiation; however, to this day, it was never used for coherent-type applications.In this work, we would like to present the first to our knowledge attempt to obtain partially coherent EUV emission with usable photon flux from xenon/helium plasma, to perform coherent imaging experiments. We present the spatial coherence measurements, performed using Young double slit interferometry and demonstration of the use of such spatially coherent radiation to imaging. In the following chapters, the details about this work will be presented and discussed. Experimental setupThe experimental setup for spatial coherence measurements of the emission from xenon plasma is depicted in Fig. 1a. An Nd:YAG laser beam, produced by NL 129 laser system (10 J/1-10 ns), from EKSPLA, Lithuania, having Abstract In this paper, we present the first measurements of the partial spatial coherence of the EUV emission from xenon plasma in laser-plasma source, based on a double stream gas puff target. The Young double slit approach was employed to measure complex coherence factor of the EUV Xe emission at 13.5-nm wavelength in two orthogonal directions. The radius of coherence of ~60 μm was estimated at the distance of 2.1 m from the source. The number of coherently emitted photons was sufficient to demonstrate coherent imaging. Using partially coherent radiation from such source Gabor EUV holography was successfully demonstrated.

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“…These patterns are combined with a phase retrieval algorithm to reconstruct the complex profiles of the object and probe beam. Ptychography provides excellent image fidelity compared to other techniques such as scanning electron microscope (SEM) imaging [1,3,6], requires no contact with the sample, has a working distance of centimeters and does not suffer from adverse effects such as surface charging.We used an actively stabilized 13.5nm HHG source (KM Labs XUUS 4.0) driven by a 20fs, 2mJ, 3kHz, Ti:Sapphire laser centered at 785nm (KM Labs Dragon), and generated a flux which was 10 times higher than was previously possible using the same driving laser [2]. The HHG light was produced in a 150µm diameter waveguide filled with 500 Torr of He.…”

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confidence: 99%

“…In particular, tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI) techniques based on high harmonic generation (HHG) are ideal for investigating complex nanostructured systems, including their static and dynamic electronic, phononic and magnetic properties. Tabletop EUV CDI combines elemental and chemical selectivity with nanometer spatial resolution, with pulse durations in the femtosecond (fs)-toattosecond (as) range [1][2][3][4][5]. In this work, we use ptychographic CDI [6][7] with high-spatial-coherence 13.5nm tabletop HHG to obtain 17.5nm spatial resolution images of a zone plate.…”

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Coherent Ptychographic Imaging Microscope With 17.5nm Spatial Resolution Employing 13.5nm High Harmonic Light

et al. 2016

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High-resolution imaging is an essential tool for understanding nanoscale systems. In particular, tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI) techniques based on high harmonic generation (HHG) are ideal for investigating complex nanostructured systems, including their static and dynamic electronic, phononic and magnetic properties. Tabletop EUV CDI combines elemental and chemical selectivity with nanometer spatial resolution, with pulse durations in the femtosecond (fs)-toattosecond (as) range [1][2][3][4][5]. In this work, we use ptychographic CDI [6][7] with high-spatial-coherence 13.5nm tabletop HHG to obtain 17.5nm spatial resolution images of a zone plate. This is the highest demonstrated resolution for a full-field tabletop microscope using any light source.In CDI, also known as lensless imaging, a coherent beam illuminates an object and the diffracted light is directly recorded on a charge-coupled device (CCD) far from the sample. The phase profile of the diffraction pattern, lost by the detector, is recovered computationally, and the object is reconstructed by numerically back-propagating this field [8]. In a newly-developed form of CDI called ptychography, many diffraction patterns are recorded as an illuminating beam is scanned across a sample. These patterns are combined with a phase retrieval algorithm to reconstruct the complex profiles of the object and probe beam. Ptychography provides excellent image fidelity compared to other techniques such as scanning electron microscope (SEM) imaging [1,3,6], requires no contact with the sample, has a working distance of centimeters and does not suffer from adverse effects such as surface charging.We used an actively stabilized 13.5nm HHG source (KM Labs XUUS 4.0) driven by a 20fs, 2mJ, 3kHz, Ti:Sapphire laser centered at 785nm (KM Labs Dragon), and generated a flux which was 10 times higher than was previously possible using the same driving laser [2]. The HHG light was produced in a 150µm diameter waveguide filled with 500 Torr of He. Differential pumping helped maintain high vacuum before and after the waveguide. After the waveguide, the residual IR light was attenuated using a pair of ZrO 2 coated Si mirrors placed near Brewster's angle, together with a single 600nm thick Zr foil filter. A single harmonic was then selected using a pair of Si/Mo multilayer mirrors.The imaging setup is depicted in Fig. 1a. A flat mirror is followed by a curved mirror (radius of curvature 100mm), which focuses the beam onto the sample. The angle of incidence on the curved mirror is approximately 2.5°, resulting in a 2.7µm 1/e 2 diameter at the circle of least confusion. Diffraction from a zone plate test sample was collected by a CCD detector (Andor iKon, 2048x2048 pixels, 13.5µm pitch) placed 22.6mm from the sample. This geometry provided a numerical aperture (NA) of 0.4, corresponding to a half-pitch resolution of 17.5nm. The beam was scanned in an 11x11 grid with ≈0.8µm steps, with a total exposure time (121 diffraction patterns, two accumulations...

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Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source

Cited by 153 publications

References 45 publications

Ptychographic microscopy via wavelength scanning

Ptychographic microscopy via wavelength scanning

Spatial coherence measurements of the EUV emission from laser-plasma source based on xenon/helium gas puff target

Coherent Ptychographic Imaging Microscope With 17.5nm Spatial Resolution Employing 13.5nm High Harmonic Light

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