2022
DOI: 10.1016/j.procir.2022.06.023
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Ultrafast laser micromanufacturing of microfluidic devices

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Cited by 12 publications
(6 citation statements)
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“…Laser subtractive manufacturing has seen widespread adoption in the field of micromanufacturing, particularly in the realm of non-equilibrium thermal ablation [37]. The 'meltfree' processing characteristics of ultrashort pulse laser ablation materials have garnered significant attention in microfabrication fields.…”
Section: Laser Subtractive Manufacturing Theorymentioning
confidence: 99%
“…Laser subtractive manufacturing has seen widespread adoption in the field of micromanufacturing, particularly in the realm of non-equilibrium thermal ablation [37]. The 'meltfree' processing characteristics of ultrashort pulse laser ablation materials have garnered significant attention in microfabrication fields.…”
Section: Laser Subtractive Manufacturing Theorymentioning
confidence: 99%
“…Silicon is a popular choice due to its chemical compatibility, resistance, and design flexibility ( da Ponte et al, 2021 ). While glass is transparent, biocompatible, and electrically insulating ( Orazi et al, 2022 ; Shubhava et al, 2022 ). However, both materials are expensive to manufacture and require specialized equipment and cleanroom facilities to ensure their purity and reliability ( Elvira et al, 2022 ; Leung et al, 2022 ).…”
Section: Introductionmentioning
confidence: 99%
“…A more consolidated approach is to create the 2.5D structures on the surface of the glass and seal it with a silicon cover, to create a closed channel [8,11]. By allowing the depth and width of each channel to vary, this approach offers a straightforward method to increase the precision of the generated geometries [12]. An aspect to consider is that the microchannel surface roughness can be altered by laser irradiation.…”
Section: Introductionmentioning
confidence: 99%