Ultra-Tuning of nonlinear drumhead MEMS resonators by Electro-Thermoelastic buckling

Kanj, Ali; Ferrari, Paolo F; Zande, Arend M. van der; Vakakis, Alexander F.; Tawfick, Sameh

doi:10.1016/j.ymssp.2023.110331

Cited by 7 publications

(1 citation statement)

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“…The MEMS switches are also classified on the basis of actuation methods used. The actuation mechanisms which are generally used for MEMS devices are electrostatic, electromagnetic, electrothermal, and piezoelectric [123,124]. The structure of these switches can be a cantilever, clamped-clamped, or diaphragm structure, but the actuation methods would be different.…”

Section: Actuation Mechanismsmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: Actuation Mechanismsmentioning

confidence: 99%