2015
DOI: 10.1016/j.jpowsour.2014.10.202
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Ultra-thin LiPON films – Fundamental properties and application in solid state thin film model batteries

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Cited by 101 publications
(88 citation statements)
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“…ion gun (Rau&Roth, 4 cm ∅ ) and an oscillating quartz balance to record the deposited thickness during sputtering. Schematic representation of the sputter chamber is presented elsewhere …”
Section: Methodsmentioning
confidence: 99%
“…ion gun (Rau&Roth, 4 cm ∅ ) and an oscillating quartz balance to record the deposited thickness during sputtering. Schematic representation of the sputter chamber is presented elsewhere …”
Section: Methodsmentioning
confidence: 99%
“…To some extent, the LiPON film has the advantage of forming contact with electrodes and they can meet the requirements of compact batteries. However, these abovementioned LiPON films exhibit relatively common conductivity levels and poor mechanical properties …”
Section: Synthesismentioning
confidence: 99%
“…Thin‐film batteries with two‐dimensional electrode/electrolyte interfaces have relatively low interfacial resistances compared to bulk‐type solid‐state batteries, where the interfacial reactions are limited due to the small contact area between the particles . In contrast, Li 3 PO 4 and LiPON, which are typical electrolyte materials for thin‐film batteries, exhibit low ionic conductivities in the order of 10 −6 ‐10 −8 S/cm. Thus, lithium diffusion in the electrolyte layer is the rate‐determining step in thin‐film batteries.…”
Section: Introductionmentioning
confidence: 99%