2023
DOI: 10.1016/j.bpj.2022.11.978
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Ultra-thin, high-lifetime silicon nitride nanopore membranes for biosensing

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Cited by 6 publications
(9 citation statements)
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“…Nanopore Fabrication: Free standing, ∼7 nm thick silicon nitride membranes with a 100 nm thick silicon dioxide underlayer of size 40 μm x 40 μm on a 300 μm thick silicon frame were fabricated as discussed previously. [47] The membranes were placed between two custom built PMMA half cells, with reservoirs containing a 1 M KCl electrolyte solution buffered to a pH of 7. A Keithely 2450 sourcemeter was used to apply an electric field <1 V nm −1 across the membrane, which was stopped as soon as a rapid surge in current was observed, indicating the creation of a nanopore.…”
Section: Methodsmentioning
confidence: 99%
“…Nanopore Fabrication: Free standing, ∼7 nm thick silicon nitride membranes with a 100 nm thick silicon dioxide underlayer of size 40 μm x 40 μm on a 300 μm thick silicon frame were fabricated as discussed previously. [47] The membranes were placed between two custom built PMMA half cells, with reservoirs containing a 1 M KCl electrolyte solution buffered to a pH of 7. A Keithely 2450 sourcemeter was used to apply an electric field <1 V nm −1 across the membrane, which was stopped as soon as a rapid surge in current was observed, indicating the creation of a nanopore.…”
Section: Methodsmentioning
confidence: 99%
“…Nanopores were fabricated using the CBD method with estimated pore diameters of ∼2 nm. The surface charge density was determined by surveying the open pore conductance with changing pH and salt concentrations [54] …”
Section: Fabrication Methods Of Nanopore Arraysmentioning
confidence: 99%
“…The surface charge density was determined by surveying the open pore conductance with changing pH and salt concentrations. [54] The ECR method utilizes the same experimental procedures as the CBD method. The term ECR was first coined in 2015 when a large electric field was used to create nanopores in a MoS 2 film suspended above an aperture in a SiNx membrane.…”
Section: In Situ Methods (Cbd Ecr and La-cbd)mentioning
confidence: 99%
“…28 The default pore diameter and length were 10 and 50 nm, respectively. 14,30,33,34 The system temperature was maintained at 298 K, and the dielectric constant of water was set to 80. Because KCl solutions are commonly applied in biosensing based on nanopores, [35][36][37] KCl solutions varying from 10 to 500 mM in concentration were chosen in the simulations, of which 100 mM was the default concentration.…”
Section: Simulation Detailsmentioning
confidence: 99%