2018
DOI: 10.1007/s12633-018-9984-z
|View full text |Cite
|
Sign up to set email alerts
|

Ultra-Thin High-K Dielectric Profile Based NBTI Compact Model for Nanoscale Bulk MOSFET

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
9
0

Year Published

2020
2020
2022
2022

Publication Types

Select...
5
1
1

Relationship

1
6

Authors

Journals

citations
Cited by 13 publications
(9 citation statements)
references
References 37 publications
0
9
0
Order By: Relevance
“…The gate bias stress is believed to be the critical characteristic to understand the interface quality of the MOSFET after the thinning process and the presence of defects could lead to a time‐dependent threshold voltage shift. [ 25 ] For n‐channel MOSFETs and/or n‐type thin film transistors, an increase in the positive bias stress (PBS) tends to attract more electrons toward the interface between the channel and the dielectric layer. These electrons are trapped either at low energy level or deep energy level trap states created by oxygen vacancy and oxygen interstitial defects of dielectric at the channel/dielectric interface.…”
Section: Resultsmentioning
confidence: 99%
“…The gate bias stress is believed to be the critical characteristic to understand the interface quality of the MOSFET after the thinning process and the presence of defects could lead to a time‐dependent threshold voltage shift. [ 25 ] For n‐channel MOSFETs and/or n‐type thin film transistors, an increase in the positive bias stress (PBS) tends to attract more electrons toward the interface between the channel and the dielectric layer. These electrons are trapped either at low energy level or deep energy level trap states created by oxygen vacancy and oxygen interstitial defects of dielectric at the channel/dielectric interface.…”
Section: Resultsmentioning
confidence: 99%
“…The natural length (λ), and hence the SCE behavior of the device can be minimized by reducing gate oxide thickness, silicon film thickness, and switching to a high-k gate dielectric, instead of SiO2 [12]- [13]. Furthermore, when the number of gates increases, the natural length decreases.…”
Section: Itc Vandalized Vth Divergence Model Developmentmentioning
confidence: 99%
“…Analytical models for NBT stressing have been researched throughout the years [19][20][21][22][23][24][25][32][33][34][35][36][37]. This model assumes continuous stress on the PMOS devices.…”
Section: Modeling Approachmentioning
confidence: 99%
“…Even though more than 40 years have passed since then, many mechanisms of NBTI are not very well understood yet. In the last decade, many different working groups are addressing NBTI effects, with accent on both description and modeling of voltage threshold shifts [19,20]. Swami presented a model for nano MOSFET for FinFET technologies [20], while Aleksandrov reported a model that is based on a reaction-diffusion principle [21].…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation