Ultra Smooth Polishing Research Based on the Cluster Magnetorheological Effect

Wu, Zhan Cheng; Yan, Qiu Sheng; Bai, Zhen Wei; Kong, Ling Ye; Chai, Jing Fu

doi:10.4028/www.scientific.net/kem.487.283

Cited by 5 publications

(3 citation statements)

References 1 publication

(1 reference statement)

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“…Hu et al [ 61 ] proposed a form of MRF process based on permanent magnetic yoke excitation for achieving a high-quality surface finish on flat zirconia ceramics (40 mm × 40 mm × 1.1 mm) using MR fluid, which is the mixture of CI particles, abrasives, an additive agent and deionized water. Clustered magnetorheological finishing (CMRF) is a novel finishing process which can be used to achieve a fine surface finish on various materials, including silicon nitride ceramics [ 62 ], glass [ 63 ], and crystal silicon substrates [ 64 ]. The CMRF process is feasible for reducing the surface roughness to the nanometer range (2.69–9 nm) [ 64 ].…”

Section: Introductionmentioning

confidence: 99%

A Review on Surface Finishing Techniques for Difficult-to-Machine Ceramics by Non-Conventional Finishing Processes

et al. 2022

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Ceramics are advanced engineering materials in which have been broadly used in numerous industries due to their superior mechanical and physical properties. For application, the industries require that the ceramic products have high-quality surface finishes, high dimensional accuracy, and clean surfaces to prevent and minimize thermal contact, adhesion, friction, and wear. Ceramics have been classified as difficult-to-machine materials owing to their high hardness, and brittleness. Thus, it is extremely difficult to process them with conventional finishing processes. In this review, trends in the development of non-conventional finishing processes for the surface finishing of difficult-to-machine ceramics are discussed and compared to better comprehend the key finishing capabilities and limitations of each process on improvements in terms of surface roughness. In addition, the future direction of non-conventional finishing processes is introduced. This review will be helpful to many researchers and academicians for carrying out additional research related to the surface finishing techniques of ceramics for applications in various fields.

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Section: Introductionmentioning

confidence: 99%

A Review on Surface Finishing Techniques for Difficult-to-Machine Ceramics by Non-Conventional Finishing Processes

et al. 2022

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“…The abrasives with different sizes aggregate on the top of MR pad are all equally effective in removing the material while interacting with the machined surface. A large region planarization and smooth surface can be achieved with this method, and a large number optimization study was carried out for difference materials [18,19] Fig. 1, the principle of cluster MR plane polishing is illustrated.…”

Section: Introductionmentioning

confidence: 99%

Material removal mechanism of cluster magnetorheological effect in plane polishing

Pan

Yan

2015

Int J Adv Manuf Technol

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A cluster magnetorheological (MR) plane polishing based on a combination of magnetorheological finishing (MRF) and cluster mechanism (arrange in a regular array) has been developed for large planar optical workpiece. In this paper, the polishing pressure of an individual MR micro-grinding head on workpieces was investigated, and the mathematical model for cluster MR plane polishing was established based on the Preston equation and the properties of the workpiece material. An arc-shaped polishing belt was processed on monocrystalline 6H-SiC and Si wafer by the cluster MR polishing apparatus which polishing disk inlaid with cylindrical flat bottom magnetic pole arrange in the same direction regularly and monocyclically. The profile of arc polishing belt's cross section and the surface morphology were observed and analysed to verify the obtained model. The abrasives with different size were found to have an equal effect on the processed surface because of the accommodatedsinking effect of the polishing pad constituted by the cluster MR micro-grinding head. It was found that the monocrystalline 6H-SiC and Si wafer were polished in a plastic mode with a smooth, damage-free surface.

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“…Magnetorheological finishing (MRF) is a computer-controlled and flexible finishing technique that is commonly used in the production of high-quality optical components [4]. It is learned from the literature that high-quality machined surfaces of optical glass, silicon and aluminum nitride ceramic substrate after lapping and polishing with the cluster MR-effect polishing tool have been obtained [5,6]. Therefore , an advanced nano-finishing of constraining abrasives by the cluster MR-effect plate is presented to lap and polish high temperature sintering formed SrTiO 3 substrate and expect to obtain an ultra-smooth and non-damage surface in this paper.…”

Section: Introductionmentioning

confidence: 99%

Advanced Nano-Finishing Process of SrTiO<sub>3</sub> Substrate by Cluster MR-Effect Plate

Bai

Yan

2013

MSF

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As a new multifunctional material, strontium titanate (SrTiO3) ceramic has a wide application in grain boundary layer capacitor (GBLC) with the microstructure characteristics of semi-conductive crystalline grain and insulated boundary. An ultra-precision nanofishing technique is developed to lap and polish the brittle and thin SrTiO3 substrate with the cluster MR-effect plate where the abrasives are constrained by the cluster MR-effect chains, under the influence of a magnetic field, the carbonyl iron particles (CIPs) and non-magnetic abrasive particles remove material from the surface of workpiece being machined in this paper. Mahr XT20 roughmeter, Keyence VHX-600 and Olympus S4000 microscopes are used to investigate the characteristic of machined surface and the mechanism of material removal. An ultra-smooth planarization surface of SrTiO3 substrate with surface roughness Ra 3.8 nm (Mahr), RMS 0.973 nm (Veeco interferometer) is obtained under a high efficiency. It is found that the pore structures of the sintered substrate would weak the machinability of SrTiO3 and influence the further improvement of surface quality.

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Ultra Smooth Polishing Research Based on the Cluster Magnetorheological Effect

Cited by 5 publications

References 1 publication

A Review on Surface Finishing Techniques for Difficult-to-Machine Ceramics by Non-Conventional Finishing Processes

A Review on Surface Finishing Techniques for Difficult-to-Machine Ceramics by Non-Conventional Finishing Processes

Material removal mechanism of cluster magnetorheological effect in plane polishing

Advanced Nano-Finishing Process of SrTiO<sub>3</sub> Substrate by Cluster MR-Effect Plate

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