Ultra-sensitive pressure sensor using double stage racetrack silicon micro resonator

Seyfari, Abbas Kalate; Bahadoran, Mahdi; Aghili, Alireza

doi:10.1007/s11082-020-02523-1

Cited by 12 publications

(4 citation statements)

References 63 publications

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“…This approach has been found to be more stable with the presence of electromagnetic disturbance compared to electrical-based sensors [3]. Thus, it has been applied to various fields of sensing such as gas [4], biosensing [5][6][7], chemical [8], temperature [9,10] and pressure sensor [11]. Having high sensitivity is the most crucial property in all-optical sensing technology, which can be achieved by optimizing the geometrical configuration [12], and material properties [13], as well as employing Fano resonance [14,15] and Vernier effect [10,[16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Integrating Vernier spectrum with Fano resonance for high sensitivity of an all-optical sensor

Aman

Noorden²,

Fajri³

et al. 2022

J Comput Electron

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Vernier and Fano resonances are promising approaches for enhancing the sensitivity of an alloptical sensor. A theoretical analysis was performed to integrate a Fano-like resonance shape with a Vernier resonance by considering the presence of partial reflective end facets at a double microring resonator waveguide. The system was developed based on scattering matrix and optical transfer function. The double and all-pass racetrack microring configurations were compared with and without the end facet at the waveguide to analyze the dynamic change of the output resonance spectrum. The spectrum were analyzed based on the free spectral range and resonance pattern. The resonator systems were applied to refractive index-based sensing protocol, which was operated by a shift of resonance wavelength with a change of refractive index. The sensitivity was optimized by varying the configuration parameters such as the radius of the ring, the distance between end facet, and the coupling coefficients. Integrating Vernier spectrum with Fano resonance improved the sensitivity for all-pass racetrack configuration by 5.16 % and the sensitivity for double racetrack configuration by 6.31 %. The recorded limit of detection (LOD) of double racetrack was 3.30 × 10 -5 .

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Section: Introductionmentioning

confidence: 99%

Integrating Vernier spectrum with Fano resonance for high sensitivity of an all-optical sensor

Aman

Noorden²,

Fajri³

et al. 2022

J Comput Electron

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“…Compared to an all-pass MRR, the add-drop MRR has the ring resonator placed between two linear waveguides, where the light is coupled into the resonator through the input port and the signal is measured at the drop port [18], [19]. The add-drop MRR configuration has enable highsensitivity optical sensing devices due to its resonant amplifications [20], [21] and its ability to form complex filter networks through cascaded structures in which supports multiple resonance peaks [22], [23].…”

Section: Introductionmentioning

confidence: 99%

Enhancing Vernier Effect through Integrated Add-Drop Microresonator for High Sensitivity All-Optical Sensing

Azrisham,

Aman,

Noorden

et al. 2024

Preprint

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The Vernier effect has recently sparked a lot of interest study in high sensitivity sensing due to its ability to suppress interstitial peaks and broaden the Free Spectral Range (FSR). An analytical simulation system was constructed to incorporate an add-drop Micro Ring Resonator (MRR) waveguide with partial reflecting air holes into the bus waveguide to acquire the interferometric resonance and generate the Vernier effect. The system was developed based on the scattering matrix method and the Optical Transfer Function (OTF). A comparison analysis has been conducted between Conventional Add-Drop (CAD) MRR and Interferometric Add-Drop (IAD) MRR configurations to measure the improved sensitivity. The spectrum was analyzed based on the FSR and the wavelength shift by the change of the refractive index. Both CAD and IAD-MRR have been optimized by varying the radii of the ring and the distance between the air holes in the bus waveguide. The optimized IAD configuration demonstrates a 166.11% enhancement in FSR value and yields higher sensitivity by 17.07% via the implementation of the reflecting holes in the bus waveguide. The IAD-MRR configuration also generated a higher Q factor value of more than four times than the CAD-MRR. These findings emphasize the potential of interferometric resonance in enhancing the Vernier effect thus achieving better performance of all-optical sensing applications.

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“…Optical microring resonators have been applied in various devices and fields, such as sensor technology, including pressure sensors (Seyfari et al, 2020), thermal sensors (Zhu & Lou, 2020), gas sensors (Koushik & Malathi, 2020), and chemical sensors (Bavili et al, 2020). Microring has also been applied as a modulator (Moradi et al, 2021) and an optical switch Singh et al, 2021) due to its compact size (Biswas et al, 2021), high compatibility (Bogaerts et al, 2012), low cost (Kim et al, 2013), and utilization of evanescence field that makes it immune towards electromagnetic disturbances (Bogaerts et al, 2012).…”

Section: Introductionmentioning

confidence: 99%

Numerical Simulation of Enhanced Optical Free Spectral Range Through Integrated Fano-Microring Configuration

Hairol Aman,

Noorden,

Ahmad Fajri

et al. 2023

MJS

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A numerical analysis of the integrated Fano-microring (IFM) racetrack resonator spectrum was performed to investigate the enhancement of the optical system’s free spectral range (FSR). The FSR is an important optical property which can contribute to the high sensitivity of optical devices. The IFM refers to the combination of Fano resonance produced in the output spectrum through the interaction of Fabry–Perot resonance and circulation resonance. This work focuses on the study of inducing Fano resonance in the microring resonator to optimize the FSR of the system. The results show that the integration of two resonances can produce a Vernier output spectrum, which significantly enhanced the FSR of the system without any need for additional ring waveguides. This work also compared the IFM resonance with the conventional microring resonance. In this simulation, the optimized FSR obtained by the IFM configuration was 266.55 nm, which is five times higher than the conventional microring configuration.

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Ultra-sensitive pressure sensor using double stage racetrack silicon micro resonator

Cited by 12 publications

References 63 publications

Integrating Vernier spectrum with Fano resonance for high sensitivity of an all-optical sensor

Integrating Vernier spectrum with Fano resonance for high sensitivity of an all-optical sensor

Enhancing Vernier Effect through Integrated Add-Drop Microresonator for High Sensitivity All-Optical Sensing

Numerical Simulation of Enhanced Optical Free Spectral Range Through Integrated Fano-Microring Configuration

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