Ultra-sensitive NO 2 sensor based on vertically aligned SnO 2 nanorods deposited by DC reactive magnetron sputtering with glancing angle deposition technique

Oros, C.; Horprathum, Mati; Wisitsoraat, Anurat; Srichaiyaperk, T.; Samransuksamer, Benjarong; Limwichean, Saksorn; Eiamchai, Pitak; Phokharatkul, Ditsayut; Nuntawong, Noppadon; Chananonnawathorn, Chanunthorn; Patthanasettakul, Viyapol; Klamchuen, Annop; Kaewkhao, J.; Tuantranont, Adisorn; Chindaudom, Pongpan

doi:10.1016/j.snb.2015.09.104

Cited by 59 publications

(8 citation statements)

References 39 publications

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“…In addition, this synthetic route allows for the fabrication of heterostructures (Figure 21e6) that can be used for the bilayer design of sensors. Various nanorods of oxide semiconductors—such as SnO 2 , [ 578,579,608,609 ] ZnO, [ 610 ] In 2 O 3 , [ 611 ] TiO 2 , [ 579 ] WO 3 , [ 578,579,612,613 ] V 2 O 5 , [ 614 ] Co 3 O 4 , [ 615 ] Cu 2 O, [ 616 ] ITO, [ 579,617 ] Au–SnO 2 , [ 578,618 ] Pd–SnO 2 , [ 609,619 ] Ag–SnO 2 , [ 618 ] carbon‐doped WO 3 , [ 620 ] Rh–WO 3 , [ 621 ] Pt–WO 3 , [ 622 ] Au–WO 3 , [ 578 ] and NiO–Co 3 O 4 [ 259 ] —have been grown for gas sensor applications. Moon et al [ 576 ] made a 3 × 3 sensor array using pristine thin films, Au‐functionalized thin films, and nanorod structures of WO 3 , SnO 2 , and In 2 O 3 prepared by on‐axis or glancing angle depositions, and they measured the gas sensing patterns of eight different gases (Figure 21f).…”

Section: Artificial Olfaction: State‐of‐the‐art and Strategies For Inmentioning

confidence: 99%

Rational Design of Semiconductor‐Based Chemiresistors and their Libraries for Next‐Generation Artificial Olfaction

2020

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With rapid progress in device integration and computing power, the realization of highly miniaturized one-chip artificial olfaction with superior performance is close and should be further supported by the rational design of chemical sensors and chemical sensing materials. The number of gas sensors tends to increase in order to sniff more complex odors with the progress of civilization. This explains the evolution from a single chemical sensor to complicated artificial olfaction using sensor arrays. At the advent of oxide chemiresistive gas sensors in the 1960s and 1970s, a single gas sensor was widely used to detect toxic, explosive, dangerous, and harmful gases, such as CO, C 3 H 8 , CH 4 , H 2 S, and NO 2 , in a selective manner. [26,27] However, a single sensor is often insufficient for recognizing most of the natural odors encountered in daily life, which consist of hundreds to thousands of different chemicals. [28] In the mammalian olfactory system, odorants are initially detected by olfactory receptors (ORs) covering the surface of the cilia projected from olfactory sensory neurons (OSNs), which are located in the olfactory epithelium lining the nasal cavity. These signals are transmitted to the glomeruli in the olfactory bulb, where a high degree of signal integration happens (Figure 1a). [29] Finally, the signals are sent through mitral cells to a higher brain region (olfactory cortex), and the signals are subsequently combined or modified in a variety of ways by parallel processing for analysis and interpretation (Figure 1b). [30] Each OR can detect various kinds of odorants, and similarly, each odorant can also be recognized by a number of ORs. That is, the olfactory system determines multiple odorants from various combinations of ORs (Figure 1c). [31] For better olfaction, both OSNs and ORs should be abundant. A larger number of OSNs is advantageous for detecting trace concentrations of analytes and ligands. [32] For instance, dogs with more OSNs are better than humans at detecting explosives, searching and rescuing, diagnosing disease, and assessing agricultural products. [33] If a mammal can detect larger numbers of faint gas components within odors, he can perceive and identify the odors more accurately. From this perspective, gas sensors with lower detection limits would be assembled to the stronger artificial olfaction. Kinds of ORs are also important. Mammals are known to have ≈1000 different kinds of ORs, and combinations of dissimilar ORs enable the discrimination of a myriad of odorants. [29] To mimic this, sensor arrays consisting of small number (5-20) of sensors that show Artificial olfaction based on gas sensor arrays aims to substitute for, support, and surpass human olfaction. Like mammalian olfaction, a larger number of sensors and more signal processing are crucial for strengthening artificial olfaction. Due to rapid progress in computing capabilities and machinelearning algorithms, on-demand high-performance artificial olfaction that can eclipse human olfaction becomes inevitable onc...

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Section: Artificial Olfaction: State‐of‐the‐art and Strategies For Inmentioning

confidence: 99%

Rational Design of Semiconductor‐Based Chemiresistors and their Libraries for Next‐Generation Artificial Olfaction

2020

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“…GLAD is a fabrication process that performs the physical vapor deposition (PVD) of target materials on a wafer scale with very high uniformity. , Also, because the deposition proceeds while the substrate is rotated at a certain angle with respect to the target materials, a nanoscale shadow area is generated by the nanoparticles that first reach the substrate, and thus nanocolumnar thin films are fabricated. ,,, In this study, nanocolumnar thin films of four types of metal oxides (SnO 2 , In 2 O 3 , WO 3 , and CuO) were deposited via RF sputtering at a glancing angle of 85°. SEM images of the four types of metal oxide thin films are shown in Figure a–d, and all types of metal oxides were deposited in the form of nanocolumns, which provides large surface-to-volume ratios of the sensing materials.…”

Section: Resultsmentioning

confidence: 99%

High Accuracy Real-Time Multi-Gas Identification by a Batch-Uniform Gas Sensor Array and Deep Learning Algorithm

et al. 2022

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Semiconductor metal oxide (SMO) gas sensors are attracting great attention as next-generation environmental monitoring sensors. However, there are limitations to the actual application of SMO gas sensors due to their low selectivity. Although the electronic nose (E-nose) systems based on a sensor array are regarded as a solution for the selectivity issue, poor accuracy caused by the nonuniformity of the fabricated gas sensors and difficulty of real-time gas detection have yet to be resolved. In this study, these problems have been solved by fabricating uniform gas sensor arrays and applying the deep learning algorithm to the data from the sensor arrays. Nanocolumnar films of metal oxides (SnO 2 , In 2 O 3 , WO 3 , and CuO) with a high batch uniformity deposited through glancing angle deposition were used as the sensing materials. The convolutional neural network (CNN) using the input data as a matrix form was adopted as a learning algorithm, which could conduct pattern recognition of the sensor responses. Finally, real-time selective gas detection for CO, NH 3 , NO 2 , CH 4 , and acetone (C 3 H 6 O) gas was achieved (minimum response time of 1, 8, 5, 19, and 2 s, respectively) with an accuracy of 98% by applying preprocessed response data to the CNN.

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“…It requires a low energy consumption in operation [ 83 , 87 , 115 ]. As shown in Table 2 , traditional semiconductor-based gas sensors generally work at 200–400 °C [ 98 , 140 , 141 , 142 ]. Some commercial gas sensors could work well at room temperature, but with some performance loss of the LOD [ 143 , 144 ].…”

Section: Discussionmentioning

confidence: 99%

Recent Progress of Toxic Gas Sensors Based on 3D Graphene Frameworks

Dong

Xiao

Chu

et al. 2021

Sensors

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Air pollution is becoming an increasingly important global issue. Toxic gases such as ammonia, nitrogen dioxide, and volatile organic compounds (VOCs) like phenol are very common air pollutants. To date, various sensing methods have been proposed to detect these toxic gases. Researchers are trying their best to build sensors with the lowest detection limit, the highest sensitivity, and the best selectivity. As a 2D material, graphene is very sensitive to many gases and so can be used for gas sensors. Recent studies have shown that graphene with a 3D structure can increase the gas sensitivity of the sensors. The limit of detection (LOD) of the sensors can be upgraded from ppm level to several ppb level. In this review, the recent progress of the gas sensors based on 3D graphene frameworks in the detection of harmful gases is summarized and discussed.

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Ultra-sensitive NO 2 sensor based on vertically aligned SnO 2 nanorods deposited by DC reactive magnetron sputtering with glancing angle deposition technique

Cited by 59 publications

References 39 publications

Rational Design of Semiconductor‐Based Chemiresistors and their Libraries for Next‐Generation Artificial Olfaction

Rational Design of Semiconductor‐Based Chemiresistors and their Libraries for Next‐Generation Artificial Olfaction

High Accuracy Real-Time Multi-Gas Identification by a Batch-Uniform Gas Sensor Array and Deep Learning Algorithm

Recent Progress of Toxic Gas Sensors Based on 3D Graphene Frameworks

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