Ultra-Precision Surface Grinder Having a Glass-Ceramic Spindle of Zero-Thermal Expansion

Namba, Yoshiharu; Wada, Reito; Unno, Kuniaki; Tsuboi, Akihiko; Okamura, Kenjirô

doi:10.1016/s0007-8506(07)62716-4

Cited by 40 publications

(4 citation statements)

References 4 publications

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“…After cleavage along the (111) plane, samples were glued in a circular arrangement onto a stainless steel machining wheel, as shown in figure 1, because we aimed for giving all of them exactly the same machining treatment. The samples were ground using an ultra-precision surface grinder [9] with an SD1500-75-B diamond wheel to obtain a flat plane among the samples. The samples were then polished on a tin lap with 3 µm diamond powder, washed out with pure water and float polished [10] on a tin lap with 7 nm diameter SiO 2 powder.…”

Section: Methodsmentioning

confidence: 99%

Nanoscale structures on ultra-precision machined fluorite surfaces

2005

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Highest purity calcium difluoride crystals having a roughness below 1 nm over large areas were prepared by ultra-precision machining to create technical surfaces for optical applications. High resolution dynamic scanning force microscopy reveals surfaces with close to atomic flatness over areas larger than 10 µm2. The residual roughness is due to a high density of pits and protrusions with a height of 0.32 nm corresponding to an F–Ca–F triple-layer that is the smallest possible unit on stoichiometric CaF2(111). Additionally, imperfections of the machining process may appear as protrusions of typically 1 nm height or a high density of aligned triple-layer steps for surfaces that were apparently slightly inclined with respect to the machining plane. A terraced structure also appears in the vicinity of nanometre-sized defects found for one sample. Machining may also cause a fracture in the form of branched channels of some tens of nanometres in width and some micrometers in length.

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Section: Methodsmentioning

confidence: 99%

Nanoscale structures on ultra-precision machined fluorite surfaces

2005

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“…[187] Zerodur was used for the guideways of a high precision linear slide. Namba et al introduced a spindle made of glass-ceramics (Neoceram) for an ultra-precision surface grinder in order to achieve zero thermal expansion [197].…”

Section: Natural Stone and Ceramicsmentioning

confidence: 99%

Materials in machine tool structures

et al. 2015

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“…He has developed a glass ceramic spindle with zero thermal expansion. Two of his interesting papers on the subject were obtained [24,25]. He is working more with optical and electronic industries.…”

Section: Chubu Universitymentioning

confidence: 99%

Survey of ceramic machining in Japan

1994

Precision Engineering

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Ultra-Precision Surface Grinder Having a Glass-Ceramic Spindle of Zero-Thermal Expansion

Cited by 40 publications

References 4 publications

Nanoscale structures on ultra-precision machined fluorite surfaces

Nanoscale structures on ultra-precision machined fluorite surfaces

Materials in machine tool structures

Survey of ceramic machining in Japan

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