2019
DOI: 10.1016/j.jeurceramsoc.2019.05.005
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Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms

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Cited by 35 publications
(4 citation statements)
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“…[73] Other oxide materials, such as yttrium oxide (Y 2 O 3 ), magnesium oxide (MgO), titanium dioxide (TiO 2 ), and zinc oxide (ZnO), are also used as protective coatings due to their favorable mechanical properties. Aluminum oxynitride (AlON) [105,106] has shown promising mechanical and optical properties that can effectively replace Al 2 O 3 films. The choice of material can depend on the desired application and the target wavelength region based on its transmission wavelength range.…”
Section: Oxidesmentioning
confidence: 99%
“…[73] Other oxide materials, such as yttrium oxide (Y 2 O 3 ), magnesium oxide (MgO), titanium dioxide (TiO 2 ), and zinc oxide (ZnO), are also used as protective coatings due to their favorable mechanical properties. Aluminum oxynitride (AlON) [105,106] has shown promising mechanical and optical properties that can effectively replace Al 2 O 3 films. The choice of material can depend on the desired application and the target wavelength region based on its transmission wavelength range.…”
Section: Oxidesmentioning
confidence: 99%
“…The material removal method during the grinding process can be analyzed by the critical cutting depth hc and the undeformed chip thickness hm [29][30][31][32] . The undeformed chip thickness for vertical surface grinding can be obtained from the following equation [8,33,34] :…”
Section: Micro-scale Grinding Mechanism Of Ito Conductive Glassmentioning
confidence: 99%
“…The procedure proposed by Oliver and Pharr [27,28] can be used to deduce the hardness and elastic moduli of various materials, and other indentation-based procedures have been proposed to investigate other mechanical parameters, such as fracture toughness [29,30], fatigue and impact testing [31]. Nowadays, nanoindentation technique is a very powerful method to investigate the mechanical properties of biomaterials [32,33], metals [34], ceramics [35], polymers, and composites [36].…”
Section: Concept Of Nanoindentationmentioning
confidence: 99%