Ultra-precision 3 DOF tilting stage for workpiece setup of scalable micro-pattern machining

Kim, Jong-Su; Youn, Hongseok; Kang, Bongchul

doi:10.1007/s12541-017-0129-x

Cited by 10 publications

(4 citation statements)

References 34 publications

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“…[ 35 ] Moreover, an ultraprecision tilting stage with 3‐degree‐of‐freedom (DOF) motions ( z ‐translation, pitch, and roll) has been utilized to fabricate precise mold patterns with resolution of less than 100 nm in a machining area of 400 × 400 mm 2 . [ 36 ] Thus, the suggested metal textures having various angles and pitches can be easily manufactured by separating Ni or Ni‐Fe electrodeposited on the surfaces of these molds through the electroforming process. Therefore, the suggested µm‐scale Ni texture can be a promising platform to implement structural colors mimicking a Papilio Palinurus with relatively easy and low‐cost process on a large scale.…”

Section: Resultsmentioning

confidence: 99%

Reproduction of Biomimetic Structural Colors via µm‐Scale Ni Textures

Park

Lee

Yim

et al. 2023

Advanced Optical Materials

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interference, which produces structural colors by reflecting a specific range of wavelengths. These structural colors generally exhibit shiny, metallic features with viewing angle dependence, which contrasts with the dull, diffuse aspects, and relatively low environmental resistance of chemical dyes or pigments. [2][3][4][5] Thus, the structural colors have extensive applications in surface decoration, sensing, anticounterfeiting, solar energy absorption, and optical filter. [6][7][8][9][10][11] Recently, there have been reports of progress in structural color generation such as a simple and scalable method for stretchable color-changing structures, [12] butterfly wing-sized nanostructures for radiative cooling and structural coloring, [13] and controlled micropore and fibril formation. [14,15] The deep blue color of Morpho butterfly's wings and the bright green color of Papilio Palinurus (emerald swallowtail butterfly) are structural colors reproduced by the combined effect of micro-nano scale structures and multilayered thin-films. [2,3,[16][17][18] To mimic these structural colors, photonic crystals, [19,20] diffraction gratings, [21,22] plasmonic nanostructures [23,24] and etc. have been utilized. These structures were mostly fabricated by using advanced nanotechnologies such as photolithography, e-beam lithography, and nanoimprinting processes followed by multilayer deposition methods. [3] Although these semiconductor processes produce high-quality nanostructures, they acquire high cost and have limitations in scaling up the size. Meanwhile, self-assembly methods [25][26][27][28] utilizing various building blocks such as block copolymers and colloids have been adopted to reproduce periodic biomimetic structures. However, there exist the issues associated with producing color materials with defect-free on a large scale. Thus, the way of implementing the structural color in microscale allows us to realize biomimetic structures with relatively easy and low-cost process. Here, a microscale textured structure combined with a Bragg stack of alternating high-and low-refractive index materials can reflect a specific wavelength band through destructive and constructive interference. By adjusting the thicknesses of the Bragg stack and the shape of the microscale texture, it is possible to selectively reflect a desired visible wavelength to reproduce structural colors. Especially, the Ni or Ni-Fe substrates fabricated by the electroforming method [28] can be used to produce the metal texture on a large scale in a mass production manner. This electroforming process can manufacture metallic products in fine A µm-scale Ni texture coated with a dielectric multilayer Bragg stack is developed to cost-effectively reproduce a variety of biomimetic structural colors on a large scale. The reflectance of the highly reflective region by the Braggstacked flat Ni-surface is significantly reduced, while the high-order reflection in the shorter wavelength region increases due to the interference effect inside the triangular Ni texture...

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Section: Resultsmentioning

confidence: 99%

Reproduction of Biomimetic Structural Colors via µm‐Scale Ni Textures

Park

Lee

Yim

et al. 2023

Advanced Optical Materials

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“…The micro-displacement positioning platform based on a flexible hinge has a series of advantages such as high positioning accuracy, high resolution, zero bounce, and zero friction. Therefore, it is widely used in ultraprecision machining [1,2], optical technology [3], nano-operation, micro-electro-mechanical msystem [4], biomedical engineering [5][6][7][8], and other fields. The design of the high-precision micro-displacement platforms has become an important indicator of industrial development.…”

Section: Introductionmentioning

confidence: 99%

Development of a 3-DOF flexible micro-motion platform based on a symmetrical two-stage magnifying mechanism

Zhang

Meng

2023

Eng. Res. Express

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A symmetrical 3-PRR flexible motion platform kinematic dynamic model is built. The natural frequency analysis of the platform is studied in this paper. Firstly, a flexible lever displacement two-stage amplification mechanism is proposed. A pseudo-rigid body model is established. A kinematics model is established by using the vector closed-loop method. The relationship between the input and output of the flexible lever displacement two-stage amplification mechanism is obtained. Secondly, based on the two-stage amplification mechanism of flexible lever displacement, a 3-PRR flexible motion platform is designed. The Jacobian matrix of input displacement of piezoelectric ceramics and output displacement of flexible motion platform is obtained by using coordinate transformation method and vector equation closed-loop method. Considering the elastic potential energy of flexible hinge and biaxial hinge, the Lagrange equation is established, and the expression of the natural frequency of 3-PRR flexible motion platform is obtained. Finally, the correctness of the theoretical dynamic model is verified by theoretical calculation and finite element software simulation. The numerical calculation and simulation results show that the maximum relative difference of the natural frequency is 17.6%, and the maximum relative difference of the output displacement of the two-stage amplification mechanism of flexible lever displacement is 13.4%.

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“…With the advancement of the era and the development of science and technology, the sub-micron-nanopositioning and control accuracy is required for modern scientific research and industrial production. The traditional actuator cannot meet the needs of precise positioning and control [1][2][3]. Therefore, the piezoelectric actuator has started to receive special attention and research from scholars [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Coupling Modeling and Adaptive Control for Piezoelectric-Actuated Positioning Stage

Zhang

2022

Modelling and Simulation in Engineering

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In this paper, a nonlinear coupling model with hysteresis, dynamics, and creep is proposed to describe accurately the complex characteristics of piezoelectric-actuated positioning stage, where a classic Hammerstein model in series with a fractional-order model is given. The fractional-order model is presented to express the nonlinear creep characteristics. Firstly, the Hammerstein structure model is composed of two blocks, where the former block is the classical PI model to describe the static hysteresis effects, and the latter block is the second-order discrete transfer function model to characterize the dynamic characteristics. In addition, the parameters of the coupling model are identified. Secondly, based on the built model, the inverse of fractional-order model and the inverse of PI model are implemented as the feedforward compensations, and an adaptive control is designed to adjust the tracking performance of the whole system. Finally, the effectiveness of the proposed coupling model and controllers are verified by the piezoelectric-actuated positioning experiment stage. Experimental results show that the established coupling model can accurately characterize the hysteresis, dynamics, and creep properties of the stage. Also, the results show that the tracking error is less than 0.8% at low frequency and mixed frequency.

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Ultra-precision 3 DOF tilting stage for workpiece setup of scalable micro-pattern machining

Cited by 10 publications

References 34 publications

Reproduction of Biomimetic Structural Colors via µm‐Scale Ni Textures

Reproduction of Biomimetic Structural Colors via µm‐Scale Ni Textures

Development of a 3-DOF flexible micro-motion platform based on a symmetrical two-stage magnifying mechanism

Coupling Modeling and Adaptive Control for Piezoelectric-Actuated Positioning Stage

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