Ultra miniaturized InterDigitated electrodes platform for sensing applications

Wang, Z.; Syed, Ali; Bhattacharya, Saurav; Chen, X.; Büttner, U.; Iordache, G.; Salama, Khaled N.; Ganetsos, Theodore; Valamontes, E.; Georgas, Antonios; Raptis, Ioannis; Οικονόμου, Π.; Botsialas, A.; Sanopoulou, M.

doi:10.1016/j.mee.2020.111253

Cited by 15 publications

(11 citation statements)

References 25 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…, Δ C / C 0 per unit of concentration change in the atmosphere) is proportional to the change in capacitance due to adsorption (Δ C ) normalized to the initial capacitance ( C 0 ), IDE sensors exhibit a lower sensitivity than MIM sensors. For example, finite element modeling revealed that even in the best-case scenario (a very small 200 nm electrode gap and a thick 5 μm sensing layer), IDE-type sensors reach only 25% of the sensitivity of MIM capacitors …”

Section: Resultsmentioning

confidence: 99%

Comparison of Thin-Film Capacitor Geometries for the Detection of Volatile Organic Compounds Using a ZIF-8 Affinity Layer

et al. 2023

View full text Add to dashboard Cite

Their chemical diversity, uniform pore sizes, and large internal surface areas make metal−organic frameworks (MOFs) highly suitable for volatile organic compound (VOC) adsorption. This work compares two geometries of capacitive VOC sensors that use the MOF material ZIF-8 as an affinity layer. When using a permeable top electrode (thickness < 25 nm), the metal−insulator− metal (MIM) sandwich configuration exhibits superior sensitivity, an improved detection limit, and a smaller footprint than the conventional interdigitated electrode layout. Moreover, the transduction of VOC adsorption in ZIF-8 via MIM capacitors is more sensitive to polar VOCs and provides better selectivity at high loadings than gravimetric and optical transductions.

show abstract

Section: Resultsmentioning

confidence: 99%

Comparison of Thin-Film Capacitor Geometries for the Detection of Volatile Organic Compounds Using a ZIF-8 Affinity Layer

et al. 2023

View full text Add to dashboard Cite

show abstract

“…By embedding the electrodes in the MOF, rather than growing the MOF over surface‐anchored electrodes, the parasitic contribution of the substrate to the measured capacitance was eliminated, enabling a low C 0 value (Figure S13, Supporting Information). [ 40 ] As a result, changes induced by analyte adsorption in the MOF crystal can be detected with a higher sensitivity (vide infra). Figure 4b shows optical microscopy images of the resulting sensor, demonstrating a non‐defective HKUST‐1 single crystal from the bottom view and the surface‐embedded interdigitated electrode on the single crystal from the top view.…”

Section: Resultsmentioning

confidence: 99%

Single‐Crystal Capacitive Sensors with Micropatterned Electrodes via Space‐Confined Growth of the Metal–Organic Framework HKUST‐1

Xia

Matavž

et al. 2022

Adv Funct Materials

View full text Add to dashboard Cite

The polyhedral shape and fragile nature of single crystals of metal-organic frameworks (MOFs) hinder their processing using standard microfabrication techniques. As a result, the fabrication of surface patterns and microelectrodes on MOF single crystals is challenging, which limits both the direct electrical interrogation of crystals in research and their integration into optical and electrical devices. Herein, a new strategy to readily fabricate surface-embossed micropatterns and surface-embedded gold electrodes on MOF single crystals using a space-confined, one-step solvothermal synthesis is demonstrated. This method is based on the confined growth of the MOF crystal around prefabricated metal patterns with different adhesion strengths to the growth surface, producing features as small as 5 µm. As a proof of concept, micropatterns are created on flat single crystals of the MOF HKUST-1, exhibiting the function as a diffraction grating. Additionally, a single-crystal HKUST-1 capacitive gas sensor with surface-embedded electrodes that serves as a stable platform for the investigation of ethanol diffusion in the MOF pores is fabricated. The space-confined fabrication strategy is promising for the integration of fragile MOF single crystals in various optical and electrical devices.

show abstract

“…The design of electrodes is chosen as interdigitated [50] to have a sensitivity gain for gas sensing applications. [51] Parylene-C was deposited using the chemical vapor deposition process for the passivation of IGZO TFT to use it as an n-type TFT. Parylene-C is chemically compatible with the IGZO TFT and provided conformal deposition.…”

Section: Igzo Thin-film Transistor Devicesmentioning

confidence: 99%

Towards a low cost fully integrated IGZO TFT NO2 detection and quantification: A solution-processed approach

Vijjapu

Surya

Zalte

et al. 2021

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

Ultra miniaturized InterDigitated electrodes platform for sensing applications

Cited by 15 publications

References 25 publications

Comparison of Thin-Film Capacitor Geometries for the Detection of Volatile Organic Compounds Using a ZIF-8 Affinity Layer

Comparison of Thin-Film Capacitor Geometries for the Detection of Volatile Organic Compounds Using a ZIF-8 Affinity Layer

Single‐Crystal Capacitive Sensors with Micropatterned Electrodes via Space‐Confined Growth of the Metal–Organic Framework HKUST‐1

Towards a low cost fully integrated IGZO TFT NO2 detection and quantification: A solution-processed approach

Contact Info

Product

Resources

About