Ultra-microhardness of vacuum-deposited films I: Ultra-microhardness tester

Nanoindentation: Measuring methods and applications

“…In the second half of the twentieth century, instruments which measured indentation depth under low load emerged. These are reported in the early work of Grodzinski [2] in 1953 and then in the 1970s in the works of Alekhin et al [3,4], Ternovskij et al [5] and Bulychev et al [6] in the former Soviet Union, of Kinosita et al [7,8] in Japan, and of Frö hlich et al [9,10] in the GDR. The work of Ternovskij and colleagues described the force-indentation depth curve and a method for deriving hardness and elastic modulus.…”

“…(8). An area function, typically of polynomial form, is then obtained by fitting the values of area obtained from Eq.…”

Nanoindentation tests for TiO2, MgO, and YSZ single crystals

“…The nanoindentation technique [3][4][5][6][7] has been developed in some decades, and the mechanical properties within a sub-micron or nano scale are widely discussed. The techniques are expected to be useful for measurement of the mechanical properties of thin films or local structure of various materials.…”

Nanoindentation studies of UO2 and (U,Ce)O2

“…The nanoindentation technique [9][10][11][12][13] has been developed in some decades, and the mechanical properties within a sub-micron or nano scale are widely discussed. The techniques are expected to be useful for measurement of the mechanical properties of thin films or local structure of various materials.…”