Abstract:For high-end silicon microphones membranes with low tensile stress are needed to achieve a high sensitivity. Common membrane materials such as silicon nitride or poly silicon have higher tensile stress or require a metallization layer for capacitive readouts. Presented here are the fabrication method and initial characterization results of electroplated nickel membranes. This membranes show a very low tensile stress in the range between 15MPa and 20MPa with a standard deviation down to 2MPa as well as a define… Show more
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