Ultra-low resistance W/Si/sub 1-x/Ge/sub x//Si source-drain contacts

Chieh, Yuen-Shung; Krusius, J.P.; Green, D.; Öztürk, Mehmet C.

doi:10.1109/drc.1995.496233

1995 53rd Annual Device Research Conference Digest

DOI: 10.1109/drc.1995.496233

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Ultra-low resistance W/Si/sub 1-x/Ge/sub x//Si source-drain contacts

Yuen-Shung Chieh

J.P. Krusius

D. Green³

et al.

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Ultra-low resistance W/Si/sub 1-x/Ge/sub x//Si source-drain contacts

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