Isolated single quantum dots enable the investigation of quantum-optics phenomena for the application of quantum information technologies. In this work, ultralow density InAs quantum dots are grown by combining Droplet Etching Epitaxy and the conventional epitaxy growth mode. The extremely low density of quantum dots (~10 6 cm -2 ) are realized by creating low density self-assembled nanoholes with the high temperature Droplet Etching Epitaxy technique and then nanohole-filling. The preferred nucleation of quantum dots in nanoholes has been explained by a theoretical model. Atomic force microscopy and photoluminescence technique are used to investigate the morphological and optical properties the quantum dot samples. By varying In coverages, the size of InAs quantum dots can be controlled. Moreover, with a thin GaAs cap layer, the position of quantum dots remains visible on the sample surface. Such a low density and surface signature of quantum dots make this growth method promising for single quantum dot investigation and single dot device fabrication.