Abstract:New ultra low capacitance bidirectional transient voltage suppression (Bi-TVS) devices consist of two parallel unidirectional TVS devices facing opposite directions, have been fabricated for electrostatic discharge (ESD) protection applications. The reduced pressure chemical vapor deposition (RPCVD) technology allows growing uniform thin Si films with various doping conditions and thicknesses of a PIN and TVS diode in one die. This result in a small turn on dynamic resistance of ∼0.7 Ω and leakage current belo… Show more
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