Ultra-high resolution zone-doubled 
diffractive X-ray optics for the multi-keV regime

Abstract

X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.

Advances in fabrication of X-ray waveguides

“…The guiding channel cross-sections in the range of 10 to 100 nm and the required length to reach well defined propagation regimes, are extremely challenging in view of fabrication. As in other x-ray focusing optics, such as Fresnel zone plates [9,10,11] or compact refractive lenses [12,13,14], the combination of small wavelength and vanishing differences in the index of refraction n ≈ 1, leads to areas and aspect ratios which are very different from their counterparts in visible light optics. Ideally, an x-ray WG consist of an empty (air filled) channel, embedded in a moderately absorbing material (cladding), with the entrance (front) and exit sides of the channel left open for coupling and decoupling of guided beam.…”

Optical design and multi-length-scale scanning spectro-microscopy possibilities at the Nanoscopium beamline of Synchrotron Soleil

“…In recent years significant progress has been reported in the development of focusing optics (Boye et al, 2009;Koyama et al, 2012;Krü ger et al, 2012;Mimura et al, 2009;Yan et al, 2011;Vila-Comamala et al, 2011;Mohacsi et al, 2014), sample positioning (Holler et al, 2012(Holler et al, , 2014Nazaretski et al, 2013Nazaretski et al, , 2015, detector technology (Johnson et al, 2012;Medjoubi et al, 2013;Ryan et al, 2009) and imaging methodologies (Hornberger et al, 2008;Menzel et al, 2010;Thibault & Menzel, 2013). These developments are triggering the construction of new state-of-the-art scanning hard X-ray nanoprobes aiming to reach down to 10 nm spatial resolution [e.g.…”

Nm-scale spatial resolution X-ray imaging with MLL nanofocusing optics: Instrumentational requirements and challenges

“…Different nanofocusing optics can be utilized to achieve high spatial resolution in the hard x-ray regime e.g. Kirkpatrick-Baez (KB) mirrors [5], Fresnel Zone Plates [6,7] and Multilayer Laue Lenses [8][9][10][11] The Hard X-ray Nanoprobe (HXN) beamline at NSLS-II has been designed and constructed to enable scanning imaging experiments with unprecedented spatial resolution and detection sensitivity. We utilized MLL optics to achieve sub-20 nm focused spot size preserving focusing efficiency in the energy range between 6 and 25 keV.…”

“…A MLL is a linear diffractive optic which overcomes the limited aspect ratio achievable for zone plates using thin film deposition technique. [12,6] In order to achieve point focusing a pair of linear MLLs has to be aligned to satisfy Bragg condition. Moreover the position of both MLL lenses has to remain constant throughout scanning experiments to avoid distortion of images due to possible drifts.…”

“…For 3D tomography measurements, an additional rotational degree of freedom is needed. Table 1 Prior to construction, rigorous R&D work has been performed for concept validation and optimization of various components [6,[9][10][11][12]. The microscope relies on piezo driven actuators to minimize heat dissipation and at the same time preserve travel ranges and adequate resolution.…”