Ultra-high quality factor planar Si_3N_4 ring resonators on Si substrates

Tien, Ming-Chun; Bauters, Jared F.; Heck, Martijn J. R.; Spencer, Daryl T.; Blumenthal, D.J.; Bowers, John E.

doi:10.1364/oe.19.013551

Cited by 129 publications

(76 citation statements)

References 19 publications

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“…Upon further coupler optimization and full exploitation of the low-loss TriPleX platform (i.e., α ch < 0.0005 dB/cm) Q-factors as high as 6 × 10 8 are predicted. A range of ring resonators suited for application over a wide wavelength range (1060, 1310 and 1550 nm) was studied in [67]. Based on single-mode TE propagation in two different TriPleX single stripe geometries (50 nm × 5.3 μm and 80 nm × 2.8 μm with bending radii of 5 and 2 mm, respectively), Q-factors of 19, 28, 7 × 10 6 were demonstrated at 1060, 1310, and 1550 nm wavelength, respectively.…”

Section: Communicationsmentioning

confidence: 99%

TriPleX: a versatile dielectric photonic platform

Wörhoff

Heideman

Leinse

et al. 2015

Advanced Optical Technologies

221

175

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Photonic applications based on planar waveguide technology impose stringent requirements on properties such as optical propagation losses, light coupling to optical fibers, integration density, as well as on reliability and reproducibility. The latter is correlated to a high level of control of the refractive index and waveguide geometry. In this paper, we review a versatile dielectric waveguide platform, called TriPleX, which is based on alternating silicon nitride and silicon dioxide films. Fabrication with CMOS-compatible equipment based on low-pressure chemical vapor deposition enables the realization of stable material compositions being a prerequisite to the control of waveguide properties and modal shape. The transparency window of both materials allows for the realization of low-loss waveguides over a wide wavelength range (400 nm-2.35 μm). Propagation losses as low as 5 × 10 -4 dB/cm are reported. Three basic geometries (box shell, double stripe, and filled box) can be distinguished. A specific tapering technology is developed for on-chip, low-loss ( < 0.1 dB) spotsize convertors, allowing for combining efficient fiber to chip coupling with high-contrast waveguides required for increased functional complexity as well as for hybrid integration with other photonic platforms such as InP and SOI. The functionality of the TriPleX platform is captured by verified basic building blocks. The corresponding library and associated design kit is available for multi-project wafer (MPW) runs. Several applications of this platform technology in communications, biomedicine, sensing, as well as a few special fields of photonics are treated in more detail.

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Section: Communicationsmentioning

confidence: 99%

TriPleX: a versatile dielectric photonic platform

Wörhoff

Heideman

Leinse

et al. 2015

Advanced Optical Technologies

221

175

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“…In the C-band at a wavelength of 1550 nm Si 3 N 4 waveguides with a propagation loss of 3 dB/m at 2 mm bend radius and 8 dB/m at 0.5 mm bend radius have been previously demonstrated [37]. In [38] ring resonators with quality factors of 7 × 10 6 at a much larger bend radius of 2 mm have been presented, corresponding to propagation losses of 2.9 dB/m. However, in both cases the waveguide core had been completely surrounded by a SiO 2 cladding, which would lead to weaker graphene-waveguide interaction because of a larger separation between the optical mode and the graphene layer.…”

Section: High Quality / Phase Sensitive Devicesmentioning

confidence: 99%

High-quality Si_3N_4 circuits as a platform for graphene-based nanophotonic devices

Gruhler¹,

Benz²,

Jang³

et al. 2013

Opt. Express

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Hybrid circuits combining traditional nanophotonic components with carbon-based materials are emerging as a promising platform for optoelectronic devices. We demonstrate such circuits by integrating singlelayer graphene films with silicon nitride waveguides as a new architecture for broadband optical operation. Using high-quality microring resonators and Mach-Zehnder interferometers with extinction ratios beyond 40 dB we realize flexible circuits for phase-sensitive detection on chip. Hybrid graphene-photonic devices are fabricated via mechanical transfer and lithographic structuring, allowing for prolonged light-matter interactions. Our approach holds promise for studying optical processes in lowdimensional physical systems and for realizing electrically tunable photonic circuits. ©2013 Optical Society of America

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“…For wider band applications covering visible wavelengths, photonic devices have to be realized in different material systems that are compatible with silicon fabrication processes. Within the group of wide bandgap semiconductors, silicon nitride (Si 3 N 4 ) has attracted particular interest for the realization of CMOS compatible nanophotonic devices [5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Waferscale nanophotonic circuits made from diamond-on-insulator substrates

Rath¹,

Gruhler²,

Khasminskaya³

et al. 2013

Opt. Express

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Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5dB/mm is also confirmed by measuring transmission through long waveguides.

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Ultra-high quality factor planar Si_3N_4 ring resonators on Si substrates

Cited by 129 publications

References 19 publications

TriPleX: a versatile dielectric photonic platform

TriPleX: a versatile dielectric photonic platform

High-quality Si_3N_4 circuits as a platform for graphene-based nanophotonic devices

Waferscale nanophotonic circuits made from diamond-on-insulator substrates

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