2007
DOI: 10.1364/oe.15.016090
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Ultra-High Q/V Fabry-Perot microcavity on SOI substrate

Abstract: We experimentally demonstrate an ultra high Q/V nanocavity on SOI substrate. The design is based on modal adaptation within the cavity and allows to measure a quality factor of 58.000 for a modal volume of 0.6(lambda/n)(3) . This record Q/V value of 10(5) achieved for a structure standing on a physical substrate, rather than on membrane, is in very good agreement with theoretical predictions also shown. Based on these experimental results, we show that further refinements of the cavity design could lead to Q/V… Show more

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Cited by 110 publications
(77 citation statements)
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“…For this condition, the reflection coefficient is zero. Equation (1) can therefore be cast as: tan(α 1 ) = n 2 /n 1 (4) where n 1 and n 2 are the refractive indices of the materials. The incidence angle α 1 can also be related to the propagation constants by…”
Section: A Single Interface At Brewster's Incidencementioning
confidence: 99%
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“…For this condition, the reflection coefficient is zero. Equation (1) can therefore be cast as: tan(α 1 ) = n 2 /n 1 (4) where n 1 and n 2 are the refractive indices of the materials. The incidence angle α 1 can also be related to the propagation constants by…”
Section: A Single Interface At Brewster's Incidencementioning
confidence: 99%
“…Bragg gratings) by engineering a periodic variation of the refractive index into their core or cladding. Thanks to the high refractive-index contrast of SOI, high reflectivity gratings as short as a few tens of micrometres can be fabricated for example by carving circular holes along the wire [4,5] or by the insertion of periodic indentation on the sidewalls [6,7]. Although not studied as extensively, the latter grating design (the photonic wire Bragg grating -PhWBG) has the advantage of facilitating a better flow and interaction with fluids, due to the exposed teeth (rather than laterally enclosed holes) resulting in easier fabrication (reduced RIE-lag effect), and better sensing performance [7].…”
Section: Introductionmentioning
confidence: 99%
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“…High-Q grating resonators have been demonstrated both theoretically and experimentally. Two major approaches are respectively based on tapering the grating near the defect [12,13] and spatially modulating the grating (period or hole radius) without a physical defect section [14,15]. Both approaches aim to define a smooth modal field.…”
Section: Introductionmentioning
confidence: 99%
“…Over the last decade, various types of optical microcavities were proposed and investigated, including whispering-gallery microcavities, Fabry-Perot microcavities, and photonic crystal microcavities [2]. Among these cavities, the nanobeam photonic crystal microcavity [3][4][5][6][7][8][9][10][11] provides not only a very high Q value, but also an ultrasmall V and an ultracompact footprint. Nanobeam photonic crystal microcavities with Q values even higher than 10 9 were demonstrated [12].…”
mentioning
confidence: 99%