Abstract:We implemented a hydrogen annealing based postprocessing technique as a tool to improve the sidewall roughness of 3 μm thick silicon-on-insulator (SOI) waveguides and demonstrated ultra-high-Q factors on racetrack resonators leveraging on the propagation loss reduction achieved through the smoothing process. The designed racetracks are based on a combination of rib waveguides and strip-waveguide-based Euler bends. We measured intrinsic quality factors of 14×10 6 for a racetrack with a footprint of ~5.5 mm 2 an… Show more
“…5(c), 6(a), and 6(b). This way, tight bends with loss lower than 0.02 dB can be achieved with effective bending radii of a few tens of microns, enabling, e.g., compact race track resonators with quality factor Q of up to 14 million 9 , 12 …”
Section: Overview Of Vtt Thick Silicon-on-insulator Platformmentioning
confidence: 99%
“…We have demonstrated several different types of wavelength filters, including ring resonators with Q up to 14 million, 9 , 12 compact MMI resonators, 43 flat-top lattice filters, 44 and flat-top ring-loaded MZIs 45 . Some of these filters can be designed to have <0.5dB excess loss.…”
Section: Overview Of Vtt Thick Silicon-on-insulator Platformmentioning
confidence: 99%
“… – 6 In this regard, the micron-scale silicon photonics platform 7 brings with it a unique set of properties and building blocks. This includes low propagation losses (down to 3dB/m demonstrated to date 8 , 9 ), broadband and low-loss coupling to fibers (≈0.5dB), fast (>40GHz) and responsive (≈1A/W) integrated germanium photodetectors, 10 upreflecting mirrors (URM) for broadband and low-loss coupling to arrays of detectors, tight bends 11 enabling high-integration density, efficient phase shifters, low-loss Mach–Zehnder interferometers, multimillion Q ring resonators, 9 , 12 polarization insensitive operation, and polarization splitters 13 and rotators, including all-silicon Faraday rotators (FRs) 14 …”
Photonic integrated circuits (PICs) are expected to play a significant role in the ongoing second quantum revolution, thanks to their stability and scalability. Still, major upgrades are needed for available PIC platforms to meet the demanding requirements of quantum devices. We present a review of our recent progress in upgrading an unconventional silicon photonics platform toward this goal, including ultralow propagation losses, low-fiber coupling losses, integration of superconducting elements, Faraday rotators, fast and efficient detectors, and phase modulators with low-loss and/or low-energy consumption. We show the relevance of our developments and our vision in the main applications of quantum key distribution, to achieve significantly higher key rates and large-scale deployment; and cryogenic quantum computers, to replace electrical connections to the cryostat with optical fibers.
“…5(c), 6(a), and 6(b). This way, tight bends with loss lower than 0.02 dB can be achieved with effective bending radii of a few tens of microns, enabling, e.g., compact race track resonators with quality factor Q of up to 14 million 9 , 12 …”
Section: Overview Of Vtt Thick Silicon-on-insulator Platformmentioning
confidence: 99%
“…We have demonstrated several different types of wavelength filters, including ring resonators with Q up to 14 million, 9 , 12 compact MMI resonators, 43 flat-top lattice filters, 44 and flat-top ring-loaded MZIs 45 . Some of these filters can be designed to have <0.5dB excess loss.…”
Section: Overview Of Vtt Thick Silicon-on-insulator Platformmentioning
confidence: 99%
“… – 6 In this regard, the micron-scale silicon photonics platform 7 brings with it a unique set of properties and building blocks. This includes low propagation losses (down to 3dB/m demonstrated to date 8 , 9 ), broadband and low-loss coupling to fibers (≈0.5dB), fast (>40GHz) and responsive (≈1A/W) integrated germanium photodetectors, 10 upreflecting mirrors (URM) for broadband and low-loss coupling to arrays of detectors, tight bends 11 enabling high-integration density, efficient phase shifters, low-loss Mach–Zehnder interferometers, multimillion Q ring resonators, 9 , 12 polarization insensitive operation, and polarization splitters 13 and rotators, including all-silicon Faraday rotators (FRs) 14 …”
Photonic integrated circuits (PICs) are expected to play a significant role in the ongoing second quantum revolution, thanks to their stability and scalability. Still, major upgrades are needed for available PIC platforms to meet the demanding requirements of quantum devices. We present a review of our recent progress in upgrading an unconventional silicon photonics platform toward this goal, including ultralow propagation losses, low-fiber coupling losses, integration of superconducting elements, Faraday rotators, fast and efficient detectors, and phase modulators with low-loss and/or low-energy consumption. We show the relevance of our developments and our vision in the main applications of quantum key distribution, to achieve significantly higher key rates and large-scale deployment; and cryogenic quantum computers, to replace electrical connections to the cryostat with optical fibers.
“…silicon-based high-contrast gratings offer a novel route for optical sensing owing to their high reflectivity over a broad spectrum, sensitive optical resonances and compatibility with the complementary metal oxide semiconductor (CMOS) technology [14][15][16]. However, as the inherent thermo-optic (TO) effect of silicon (Si), the resonance wavelength of silicon-based sensors is very sensitive to temperature variations.…”
We propose a double-layer high-contrast metagrating structure with robust high-quality (Q) and temperature self-compensation for four-band refractive index sensing. The structure supports four-band symmetry-protected bound states in the continuum (SP-BICs) that transform into quasi-BICs as a result of structural symmetry breaking. However, the Q-factor of these quasi-BICs are limited by perturbation parameters, hampering practical fabrication. Interestingly, tuning the cavity length, we implement four-band Fabry–Pérot bound states in the continuum (FP-BICs) to transform the resonance mode back into high-Q quasi-BICs even at large perturbations. This approach is conducive to improving robustness and modulation freedom of Q-factors. In addition, we achieve temperature self-compensation by using the double-layer high-contrast metagrating consists of two materials with opposite thermo-optic (TO) dispersions. The simulation results indicate that the largest refractive index sensitivity is 470.9 nm/RIU, its figure of merit is 427818.2, and its Q-factor up to 9.3×105. The proposed double-layer high-contrast metagrating has potential application prospects for multiplex and high-performance sensing.
“…Silicon photonics platforms based on a micron-scale thick device layer 1,2 allow for a unique combination of tight bends [3][4][5] and relatively large modes, enabling dense integration with low propagation losses (down to 3 dB/m demonstrated 6 ) and low coupling losses over a very broad wavelength range. One of the main challenges in these platforms is the realization of compact power splitters.…”
We have systematically studied multimode interferometer (MMI) splitters made from multiple tapered sections. The goal is to create a library of robust and low-loss splitters covering all splitting ratios (SR) for our silicon photonics platform based on 3 µm thick waveguides. The starting point is always a non-tapered canonical MMI either with general symmetry (canonical SRs 50:50, 100:0, and reciprocal ratios), with mirror symmetric restricted symmetry (canonical SRs 85:15, 50:50, 100:0, and reciprocal ratios), and with point-symmetric restricted symmetry (canonical SRs 72:28 and 28:72). Splitters of these three types are then divided into one to four subsections of equal length, leading to 12 possible different configurations. In each of these subsections, the width is first linearly tapered either up or down and then tapered back to its starting value ensuring mirror symmetry. For all twelve configurations, we carried out an extensive campaign of numerical simulations. For each given width change, we scanned the splitter length and calculated the power in the fundamental mode at the output as well as its relative phase. We then selected the designs with sufficiently low loss and mapped their SR as a function of either the change in width change or length, therefore creating systematic maps for the design of MMI splitters with any SR. Eventually, we selected and fabricated a subset of designs with SRs ranging from 5:95 to 95:5 in steps of 5% and validated their operation through optical measurements.
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