Ultra-high areal capacitance and high rate capability RuO2 thin film electrodes for 3D micro-supercapacitors

Asbani, B.; Buvat, Gaëtan; Freixas, Jeremy; Huvé, Marielle; Tománek, David; Roussel, Pascal; Brousse, Thierry; Lethien, Christophe

doi:10.1016/j.ensm.2021.07.038

Cited by 47 publications

(36 citation statements)

References 33 publications

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“…2b). Extremely high capacitances varying from 7.3 to 20.3 F cm -2 were obtained at 1 mV s -1 , which are by far the highest values ever reported for a microsupercapacitor electrode [7,25]. We then evaluated the ease with which the charge is accessible when the thickness of the hydrous RuO2 layer is increased by calculating the internal and external capacitance as proposed by Trassati et al [26].…”

Section: Ruo2xh2o / Pt Dhbt Electrodesmentioning

confidence: 98%

Highly porous scaffolds for Ru-based microsupercapacitor electrodes using hydrogen bubble templated electrodeposition

Karroubi¹,

Patnaik²,

Assresahegn³

et al. 2022

Energy Storage Materials

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Section: Ruo2xh2o / Pt Dhbt Electrodesmentioning

confidence: 98%

Highly porous scaffolds for Ru-based microsupercapacitor electrodes using hydrogen bubble templated electrodeposition

Karroubi¹,

Patnaik²,

Assresahegn³

et al. 2022

Energy Storage Materials

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“…14 In the end, a comprehensive enhancement of electrochemical properties has been achieved accompanying with good mechanical robustness to overcome the damage both in the integration process and practical applications. [24][25][26] Unfortunately, for MSCs based on LbL or scaffold-assisted 3D electrode design, it is still not small enough to meet the application requirements of microintravascular implants for medical treatment. In this case, rolling origami (Figure 2C) is considered as a good alternative, which can dramatically scale down the device size and provide sufficient volumetric energy density and cycle retention.…”

Section: Smart Design Concepts Of Electrodes and Their Advantagesmentioning

confidence: 99%

“…Due to the same technological mechanism and roadmap, more than 17 years of intensive investigation on 3D electrode construction of lithium-ion solid MBs allows the rapid upscaling of the 3D MSCs design in the last 10 years. 24,53,54,[60][61][62][63]83,84 Silicon has been spotlighted as a prevalent scaffold material, because of its outstanding robustness property and well-developed fabrication techniques (such as photolithography), based on which the influence of nanostructure geometry on energy storage performance has been intensively studied. The AEF has been proposed and defined as the ratio between the surface area of a 3D electrode (S 3D ) and the footprint area on a planar substrate (S planar ).…”

Section: Scaffold-assisted 3d Electrode Design For Mscsmentioning

confidence: 99%

“…More recently, Asbani and coworkers 24 demonstrated an approach to enhance the capacitive performance of Eventually, an ultrahigh capacitive performance electrode based on 170 µm-depth silicon microtubular scaffold (AEF = 66) coating with 427-nm-thick RuO 2 film was obtained (Figure 7A). The fine-tuned 3D electrode exhibits a remarkable capacitance of 4300 mF/cm 2 at 100 mV/s and delivers ~90% of initial capacitance after 10,000 cycles.…”

Section: Scaffold-assisted 3d Electrode Design For Mscsmentioning

confidence: 99%

“…This is widely investigated as a prevalent technique to fulfill the structural and chemical requirements for advanced MBs and MSCs application. 24,45,60,61,84 Consequently, benefiting for the synergy of ALD and electrodeposition technique, the PPy//MnO 2 asymmetric MSC based on SnO 2 /AAO scaffold (AEF = 240) accomplishes effective ion migration and ample electroactive surface area within a limited footprint area, finally delivering a high device capacitance of 128 mF/cm 2 at 0.5 mA/cm 2 . Simultaneously, the peak energy and power densities are 160 µW/cm 2 and 40 mW/cm 2 , respectively, coupling with a considerable cycling life span (82.5% of initial capacitance after 10,000 cycles).…”

Section: Scaffold-assisted 3d Electrode Design For Mscsmentioning

confidence: 99%

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Emerging smart design of electrodes for micro‐supercapacitors: A review

2022

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Owing to high power density and long cycle life, micro-supercapacitors (MSCs) are regarded as a prevalent energy storage unit for miniaturized electronics in modern life. A major bottleneck is achieving enhanced energy density without sacrificing both power density and cycle life. To this end, designing electrodes in a "smart" way has emerged as an effective strategy to achieve a trade-off between the energy and power densities of MSCs. In the past few years, considerable research efforts have been devoted to exploring new electrode materials for high capacitance, but designing clever configurations for electrodes has rarely been investigated from a structural point of view, which is also important for MSCs within a limited footprint area, in particular. This review article categorizes and arranges these "smart" design strategies of electrodes into three design concepts: layer-by-layer, scaffoldassisted and rolling origami. The corresponding strengths and challenges are comprehensively summarized, and the potential solutions to resolve these challenges are pointed out. Finally, the smart design principle of the electrodes of MSCs and key perspectives for future research in this field are outlined.

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Major Improvement in the Cycling Ability of Pseudocapacitive Vanadium Nitride Films for Micro‐Supercapacitor

Jrondi

Buvat

Peña

et al. 2023

Advanced Energy Materials

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on a substrate by deposition methods allowing a fine control of film quality and thickness. [1][2][3] When talking about MSC, the total thickness of the stacked films is below 50 µm (substrate ≈ 500 µm) and the footprint surface (<1 cm 2 ) is controlled by etching technique (top down approach: chemical or plasma etching methods) or localized growth of the active material on current collector (bottom up approach: ink jet printing, electrodeposition).The first MSC was made in 2001 by Yoon et al.: the magnetron sputtering deposition technique was selected to stack electrode material and solid electrolyte on a silicon wafer giving rise to Si/SiO 2 /RuO 2 / LiPON/RuO 2 stacked layers. [4,5] The capacitance retention of this MSC was restricted (<1000 cycles) and the rate capability was limited owing to the low ionic conductivity of the LIPON solid electrolyte [6][7][8] (σ ionic ≈ 10 −6 S cm −1 at room temperature) but the triangular shape of the galvanostatic charge-discharge plot confirmed the pseudocapacitive properties of the RuO 2 /LIPON/RuO 2 MSC. More than 20 years after this first demonstration, it must be said that Vanadium nitride film made using a thin film deposition technique is a promising electrode material for micro-supercapacitor applications owing to its high electrical conductivity and high volumetric and surface capacitance values in aqueous electrolyte. Nevertheless, the cycling stability has to be improved to deliver good capacitance during a large number of cycles. Here, it is shown that vanadium nitride films made by a magnetron sputtering deposition method exhibit remarkable cycling stability (high capacitance retention value after 150 000 cycles), ultra-high rate capability (75% of the initial capacitance at 1.6 V s −1 ), while providing high surface capacitance values (≈1.4 F cm −2 ) and very low ageing of the VN electrodes (no loss of performance after 13 months). Additionally, new findings regarding the location of vanadium oxides species responsible for the charge storage mechanism in pseudocapacitive VN films are revealed by transmission electron microscopy electron energy-loss spectroscopy analyses at the nanoscale.

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Ultra-high areal capacitance and high rate capability RuO2 thin film electrodes for 3D micro-supercapacitors

Cited by 47 publications

References 33 publications

Highly porous scaffolds for Ru-based microsupercapacitor electrodes using hydrogen bubble templated electrodeposition

Highly porous scaffolds for Ru-based microsupercapacitor electrodes using hydrogen bubble templated electrodeposition

Emerging smart design of electrodes for micro‐supercapacitors: A review

Major Improvement in the Cycling Ability of Pseudocapacitive Vanadium Nitride Films for Micro‐Supercapacitor

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