Two-Wavelength Grating Interferometry for MEMS Sensors

Ferhanoğlu, Onur; Toy, M. Fatih; Ürey, Hakan

doi:10.1109/lpt.2007.908450

Cited by 22 publications

(14 citation statements)

References 13 publications

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“…(4). Although the unambiguous detection range of the interferometer output is limited by quarter wavelength, multiwavelength detection architectures may be conveniently adapted to the proposed setup to significantly improve the detectable displacement range [10] for direct deduction of the amount of total displacement. The amount of sensor displacement, corresponding to about 17 interference fringes, totals up to 5 µm, revealing a thermomechanical sensitivity of approximately 1000 nm/ • C based on the temperature increase recorded by the digital thermometer.…”

Section: Resultsmentioning

confidence: 99%

Thermomechanical MEMS membranes for fiber optic temperature sensing

Ferhanoğlu¹

2017

Turk J Elec Eng & Comp Sci

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Section: Resultsmentioning

confidence: 99%

Thermomechanical MEMS membranes for fiber optic temperature sensing

Ferhanoğlu¹

2017

Turk J Elec Eng & Comp Sci

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“…For λ 1 ¼ 650 nm and λ 2 ¼ 633 nm, this implies an enhancement of the range from 160 nm up to 6 μm. This advantage was previously demonstrated using a dynamic diffraction grating based Fourier transform spectrometer [14].…”

Section: Introductionmentioning

confidence: 91%

“…2 − λ interferometry was first implemented starting in the early 1970s [12,13]. The 2 − λ readout for diffraction grating interferometers as a method for maintaining the sensitivity for a large range of displacements were previously demonstrated [14,15]. The most important advantages of the 2 − λ readout of grating based sensor arrays can be summarized below.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout

Ferhanoğlu

Ürey

2011

Appl. Opt.

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Diffraction gratings integrated with microelectromechanical systems (MEMS) sensors offer displacement measurements with subnanometer sensitivity. However, the sensitivity of the interferometric readout may drop significantly based on the gap between the grating and the reference surface. A two-wavelength (2-λ) readout method was previously tested using a single MEMS sensor for illustrating increased displacement measurement capability. This work demonstrates sensitivity enhancement on a sensor array with large scale parallelization (~20,000 sensors). The statistical representation, which is developed to model sensitivity enhancement within a grating based sensor array, is supported by experimental results using a thermal sensor array. In the experiments, two lasers at different wavelengths (633 and 650 nm) illuminate the thermal sensor array from the backside, time-sequentially. The diffracted first order light from the array is imaged onto a single CCD camera. The target scene is reconstructed by observing the change in the first diffracted order diffraction intensity for both wavelengths. Merging of the data from two measurements with two lasers was performed by taking the larger of the two CCD measurements with respect to the reference image for each sensor. ~30% increase in the average sensitivity was demonstrated for a 160×120 pixel IR sensor array. Proposed architecture is also applicable to a variety of sensing applications, such as parallel biosensing and atomic force microscopy, for improved displacement measurements and enhanced sensitivity.

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“…Thus, the deflection can be measured by monitoring the sinusoidal intensity modulation. An unambiguous detection range can be increased substantially by using two lasers and two detectors for the readout [6]. In order to extract the frequency response and the resonance frequency of the beams, the driving signal was swept over a band of frequencies and the PD output is recorded.…”

Section: A Fabrication and Setupmentioning

confidence: 99%

A Magnetically Actuated Resonant Mass Sensor With Integrated Optical Readout

Ozturk

Ocakli

Ozber

et al. 2008

IEEE Photon. Technol. Lett.

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Nickel cantilevers with integrated diffraction gratings are used as resonant mass sensors with a resolution of 500 femtograms. Their applicability to biosensing is demonstrated with human opioid receptors. The device is fabricated through a single-mask lithographic process. The microoptical readout provides a simple measurement platform with one external photodiode. Thanks to its ac operation principle, the device is immune to environmental noise and entails a high tolerance to fabrication defects. Obtained signal-to-noise ratio is comparable to that of a high-end Doppler vibrometer. The device with these aspects for systems integration and microarray technology is a candidate for low-cost portable sensors.

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Two-Wavelength Grating Interferometry for MEMS Sensors

Cited by 22 publications

References 13 publications

Thermomechanical MEMS membranes for fiber optic temperature sensing

Thermomechanical MEMS membranes for fiber optic temperature sensing

Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout

A Magnetically Actuated Resonant Mass Sensor With Integrated Optical Readout

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