Two temperature approach to femtosecond laser oxidation of molybdenum and morphological study

Kotsedi, L.; Kaviyarasu, K.; Fuku, Xolile; Eaton, Shane M.; Amara, El-Hachemi; Bireche, F.; Ramponi, Roberta; Mâaza, M.

doi:10.1016/j.apsusc.2016.11.216

Cited by 17 publications

(6 citation statements)

References 19 publications

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“…Table 2 outlines the observations and possible reasons for it, for each laser net fluence. From the theoretical calculations of the laser-matter interactions and some experimental observations from other research groups [23], it is deduced that at higher fluence there is melting and subsequent recrystallization of the coating. This can be clearly seen in the case of nanosecond laser exposure at higher fluence, wherein the top layer of the coating form islands when the melt recrystallizes.…”

Section: Scanning Electron Microscopymentioning

confidence: 95%

Chromium oxide formation on nanosecond and femtosecond laser irradiated thin chromium films

et al. 2019

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Section: Scanning Electron Microscopymentioning

confidence: 95%

Chromium oxide formation on nanosecond and femtosecond laser irradiated thin chromium films

et al. 2019

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“…Laser modification of materials is an extensive and ongoing area of research. For transition metal oxides, such as MoO x , results have been reported on the formation of, or transformation between, different phases of molybdenum oxide using various pulsed [24,25,29] and continuous wave (CW) [30,31] laser systems. One potential advantage of using laser irradiation is the wide range of parameters available through the proliferation of modern laser systems.…”

Section: Resultsmentioning

confidence: 99%

“…However, since the entire metal pattern is oxidized, the TMD material typically grows completely around all the metal pattern, complicating subsequent device fabrication. To provide additional control over the location and quality of the TMD growth, this work investigates the use of localized heating through laser irradiation to produce suitable MoO 2 precursor at specific locations on the bulk transition metal [23][24][25][26]. As shown in figure 1 selectively producing the oxide precursor using a focused laser can result in localized growth of TMD material.…”

Section: Introductionmentioning

confidence: 99%

Selective oxidation of metallic contacts for localized chemical vapor deposition growth of 2D-transition metal dichalcogenides

Bizhani,

Jensen,

Poston

et al. 2024

Mater. Res. Express

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Chemical vapor deposition (CVD) is the most common fabrication method for transition metal dichalcogenides (TMDs) where direct chemical vapor phase reaction between an oxide transition metal and chalcogen powder results in formation of high-quality crystals of TMDs. However, in this method the nucleation is often random with incomplete nucleation and non-uniform thickness. In this work we studied the formation of a localized transition metal oxide which resulted in controllable growth of mono- to few-layer MoS2 around the formed oxide region. Bulk molybdenum patterns were irradiated with a 532 nm continuous wave laser creating a localized hot-spot which, under ambient conditions, resulted in the formation of molybdenum oxide. The characteristics of the subsequent MoS2 growth depended on the type and thickness of the MoOx which was determined by the power and duration of laser exposure. The resulting MoOx and MoS2 growth around the localized oxide regions were investigated by Raman and photoluminescence spectroscopy. Our studies have shown that exposing bulk molybdenum patterns to 10 mW of laser power for about 2s results in the minimal formation of MoO2 which coincides with high quality mono- to few-layer MoS2 growth.

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“…This is why the optical dynamics must be taken into account during the simulation. Yang et al [14], Chowdhury et al [21] and Kotsedi et al [30] considered R and α as constants, which may be valid only at low temperatures. Figure 2 shows the time evolution of the calculated electron and lattice temperatures of copper at a fluence of 10 J/cm 2 and the contour of lattice temperature versus time and position, calculated from the TTM Equations (1) and (2).…”

Section: Resultsmentioning

confidence: 99%

Ablation of Copper Metal Films by Femtosecond Laser Multipulse Irradiation

et al. 2018

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Ablation of copper using multipulse femtosecond laser irradiation with an 800 nm wavelength and 120-fs pulse duration is investigated theoretically. A two-temperature model, which includes dynamic optical and thermal-physical properties, is considered. The numerical results of the material thermal response obtained by varying the pulse number, the separation times between pulses and laser fluences are presented. Our results show that the increasing of pulse number with a separation time less than the thermal relaxation time can dramatically enhance the lattice temperature without a noticeable increase in ablation depth. Therefore, we suggest that the vaporization rate can be augmented in comparison to the melting rate during the same single-phase explosion at the same total fluence where a fast heat accumulation effect plays an important role for cleaner ablation during micromachining.

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Two temperature approach to femtosecond laser oxidation of molybdenum and morphological study

Cited by 17 publications

References 19 publications

Chromium oxide formation on nanosecond and femtosecond laser irradiated thin chromium films

Chromium oxide formation on nanosecond and femtosecond laser irradiated thin chromium films

Selective oxidation of metallic contacts for localized chemical vapor deposition growth of 2D-transition metal dichalcogenides

Ablation of Copper Metal Films by Femtosecond Laser Multipulse Irradiation

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