Two-step magnetic self-alignment of folded membranes for 3D nanomanufacturing

Nichol, Anthony J.; Stellman, Paul; Arora, William J.; Barbastathis, George

doi:10.1016/j.mee.2007.01.217

Cited by 18 publications

(20 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The equilibria are then spaced by the same distance a. We showed this experimentally by switching the array alignment by one full period when folding and unfolding two membranes using an external field [1], as shown in Figure 2. The same effect can be achieved by rotating the in-plane magnetization of circular nanomagnets , as shown in Figure 1c.…”

Section: Tuning By Small Step Shiftingmentioning

confidence: 95%

“…We recently showed that nanomagnet arrays patterned on thin silicon nitride membranes can be used for actuation and self-alignment of membranes in stacked or folded configurations [1]. The membranes can additionally be patterned with nanophotonic features and aligned to the necessary tolerances for two dimensional (2D) and three-dimensional (3D) photonic devices.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Reconfigurable Nanophotonic Systems By Tunable Alignment Between Nanomagnet Arrays

Nichol

Arora

Barbastathis

2007

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Self Cite

View full text Add to dashboard Cite

We demonstrate self-alignment and tunable displacements of released nanopatterned membranes by use of arrays of nanomagnets. The nanomagnet arrays attract and align when brought into close proximity resulting in sub-200nm accurate self-alignment between membrane segments of >50μm lateral size. The alignment is made reconfigurable by patterning the nanomagnets so that there are multiple stable alignment states. An external field is used to transfer between alignment states by applying a magnetic torque on the arrays and by shifting the nanomagnet polarity. Realignment via folding and unfolding of membranes was demonstrated using 75nm thick cobalt nanomagnets patterned on 1um thick silicon nitride membranes. Accurately aligned reconfigurable 2D or 3D nanophotonic systems, such as active photonic crystals and sheared photonic crystal waveguides, may be fabricated with this method.

show abstract

Section: Tuning By Small Step Shiftingmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

Reconfigurable Nanophotonic Systems By Tunable Alignment Between Nanomagnet Arrays

Nichol

Arora

Barbastathis

2007

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Self Cite

View full text Add to dashboard Cite

show abstract

“…An alternate approach is to fabricate a similar structure by folding or stacking a patterned membrane, using one of the approaches we have previously demonstrated such as ion-implantation stress 13 or magnetically actuated folding. 14 The concept is shown in Fig. 3.…”

Section: Alternate Design For Practical Implementationmentioning

confidence: 99%

Dynamic group velocity control in a mechanically tunable photonic-crystal coupled-resonator optical waveguide

et al. 2009

Self Cite

View full text Add to dashboard Cite

We describe a tunable slow light device based on a photonic-crystal with a mechanically adjustable coupledresonator optical waveguide structure. The lateral energy confinement is implemented along a lattice shear defect with the group velocity actively controlled by shifting the shear along the defect interface over a distance of one crystal period. The group velocity tuning range can be anywhere from arbitrarily small ͑determined by the waveguide structure͒ to near the value expected in bulk media. We present the theory and a demonstration ͑via simulation͒ of a device configuration that is realistic to fabricate and achieves a tunable range of group velocity spanning at least three orders of magnitude. The conditions for stopping the light are also discussed for different configurations.

show abstract

“…According to the reported results, there are some successful examples of magnetic polymers. Barbastathis et al [22,23] obtained membranes patterned with arrays of nanomagnets by e-beam evaporation and optical lithography. The as-prepared membranes can be folded and coarsely aligned in magnetic field.…”

Section: Introductionmentioning

confidence: 99%

Preparation of a novel ferrofluidic photoresist for two-photon photopolymerization technique

Tian

Jiang

et al. 2012

Journal of Magnetism and Magnetic Materials

View full text Add to dashboard Cite

Two-step magnetic self-alignment of folded membranes for 3D nanomanufacturing

Cited by 18 publications

References 2 publications

Reconfigurable Nanophotonic Systems By Tunable Alignment Between Nanomagnet Arrays

Reconfigurable Nanophotonic Systems By Tunable Alignment Between Nanomagnet Arrays

Dynamic group velocity control in a mechanically tunable photonic-crystal coupled-resonator optical waveguide

Preparation of a novel ferrofluidic photoresist for two-photon photopolymerization technique

Contact Info

Product

Resources

About