“…9(b)]. The minimal value was indeed obtained for 0.1 μm, with a root means square height Sq of 81.65 nm, of the same order of magnitude as that reported for standard 2PP-DLW techniques 30 However, in this case, the total writing time is 60 min, whereas it is much shorter for lower resolutions: 10 min and 5 min, for 0.3 and 0.5 μm, respectively. Given the moderate difference in surface roughness observed between the 0.3 and 0.5 μm cases (98 versus 88 nm) and the significant gain in fabrication time (×2), the SR used for lens fabrication on the VCSEL chip was finally set at 0.5 μm.…”