2021 26th Microoptics Conference (MOC) 2021
DOI: 10.23919/moc52031.2021.9598125
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Two-Photon Polymerization-based Direct Laser Writing and Characterization of Micro-Lenses for Optical Interconnect Applications

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Cited by 4 publications
(4 citation statements)
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“…9(b)]. The minimal value was indeed obtained for 0.1 μm, with a root means square height Sq of 81.65 nm, of the same order of magnitude as that reported for standard 2PP-DLW techniques 30 However, in this case, the total writing time is 60 min, whereas it is much shorter for lower resolutions: 10 min and 5 min, for 0.3 and 0.5 μm, respectively. Given the moderate difference in surface roughness observed between the 0.3 and 0.5 μm cases (98 versus 88 nm) and the significant gain in fabrication time (×2), the SR used for lens fabrication on the VCSEL chip was finally set at 0.5 μm.…”
Section: On-demand Fabrication On Chip Using Free-form 3d Printingsupporting
confidence: 66%
“…9(b)]. The minimal value was indeed obtained for 0.1 μm, with a root means square height Sq of 81.65 nm, of the same order of magnitude as that reported for standard 2PP-DLW techniques 30 However, in this case, the total writing time is 60 min, whereas it is much shorter for lower resolutions: 10 min and 5 min, for 0.3 and 0.5 μm, respectively. Given the moderate difference in surface roughness observed between the 0.3 and 0.5 μm cases (98 versus 88 nm) and the significant gain in fabrication time (×2), the SR used for lens fabrication on the VCSEL chip was finally set at 0.5 μm.…”
Section: On-demand Fabrication On Chip Using Free-form 3d Printingsupporting
confidence: 66%
“…In terms of integration flow with the front-end and the back-end packaging, the definition of the input and output profiles of the external optics is thus key to enable a seamless integration and a high-efficiency coupling to PICs/fibers/free-space. B-PHOT has spent a lot of effort on further developing interfacing structures and components, such as advanced mode conversion downtapers [3,4], optical planar waveguide-based interposers [5], refractive and diffractive micro-optics [6,7], metalenses [7], etc. to broaden the OIP4NWE back-end offering.…”
Section: Back-end External Opticsmentioning
confidence: 99%
“…These parameters operate by evaluating the structure's slope and decreasing slicing distance when the structure's slope is shallower, increasing the print time and allowing for the creation of smooth structures such as lenses. 32 In future studies, these parameters could be incorporated into the milliswimmer fabrication process and optimized to create structures more closely matched to our model assumptions.…”
Section: Milliswimmer Assembly Processmentioning
confidence: 99%