1997
DOI: 10.2172/514411
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Two new methods for simulating photolithography development in 3D

Abstract: DISCLAIMER 'thisd~tw~~A*ana~t& wti~~magq& *Utiti*t~Gv~t. Ndther the United Statea Government nor the UNVeraityof California nor qny of their employees,makes any warranty, expressor implied, or assumesany legalliabilityor responsibilityfor the accurq, co@etemsa, or WeMnesaofany inforrnatim apparatus, pmdu@ or~dkloae4 or~ts that its use would not Wrings privatelyown dghts. Referenceherein to qy spaific commerd products, process,or serviceby trade nanw trad~manufacturer,or otherwke, doea not necesaady mnatitute o… Show more

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Cited by 63 publications
(92 citation statements)
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References 3 publications
(3 reference statements)
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“…Min and Gibou also used the idea of Russo and Smereka with slight modifications in the context of adaptive mesh refinement [90], and Min pointed out that it is advantageous in terms of speed and memory to replace the traditional Runge-Kutta scheme in time with a Gauss-Seidel iteration of the forward Euler scheme [88]. Finally, we mention that other techniques can be used to reinitialize φ as a distance function [125,124,149,166,148,31,147,53], each with their pros and cons. We refer the interested readers to the book by Osher and Fedkiw [101] as well to the book by Sethian [127] for more details on the level-set method.…”
Section: Level-set Evolution and Reinitializationmentioning
confidence: 99%
“…Min and Gibou also used the idea of Russo and Smereka with slight modifications in the context of adaptive mesh refinement [90], and Min pointed out that it is advantageous in terms of speed and memory to replace the traditional Runge-Kutta scheme in time with a Gauss-Seidel iteration of the forward Euler scheme [88]. Finally, we mention that other techniques can be used to reinitialize φ as a distance function [125,124,149,166,148,31,147,53], each with their pros and cons. We refer the interested readers to the book by Osher and Fedkiw [101] as well to the book by Sethian [127] for more details on the level-set method.…”
Section: Level-set Evolution and Reinitializationmentioning
confidence: 99%
“…Among such methods are the fast marching method and the fast sweeping method. The fast marching method [48,43,22,44,45] is based on the Dijkstra's algorithm [18]. The solution is updated by following the causality in a sequential way; i.e., the solution is updated pointwise in the order that the solution is strictly increasing (decreasing); hence two essential ingredients are needed in the algorithm: an upwind difference scheme and a heap-sort algorithm.…”
Section: Introductionmentioning
confidence: 99%
“…An efficient single-pass method to solve the Eikonal equation was originally designed by Tsitsiklis (1995) and rediscovered by Helmsen et al (1996) and Sethian (1996) and it is widely known as the FMM. The FMM provides a continuous solution to the shortest-path problem by employing upwind differences and a causality condition.…”
Section: Minimum-cost Pathwaysmentioning
confidence: 99%