Two-dimensional synchronous motion modulation MEMS structure for suppressing 1/f noise in magnetoresistive sensors
Qifeng Jiao,
Jiahui Luo,
Zhenhu Jin
et al.
Abstract:Magnetoresistive (MR) sensors have great application prospects in the field of weak magnetic field detection due to their high sensitivity, small size, and low power consumption. However, 1/f noise greatly limits the low-frequency detectivity of MR sensors. In order to suppress 1/f noise, this paper proposes a two-dimensional synchronous motion modulation (TDSMM) structure based on microelectromechanical systems (MEMS). This structure can effectively reduce 1/f noise by modulating the frequency of the measured… Show more
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