Two-dimensional microstructures induced by femtosecond vector light fields on silicon

Lou, Kai; Qian, Sheng-Xia; Wang, Xiaohao; Li, Yongnan; Gu, Bing; Tu, Chenghou; Wang, Hui-Tian

doi:10.1364/oe.20.000120

Cited by 86 publications

(50 citation statements)

References 30 publications

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“…In contrast to the aforementioned observations, Wang et al pointed out that regular ripple structures slant by 45° with respect to linear polarization and can be produced under the irradiation of circularly polarized fs laser pulses [24]. Recently, two-dimensional (2D) LIPSS have been formed by arbitrary designed fs vector laser fields on the surface of silicon [25]. Most studies have been focused on the effect of fs laser polarization on LIPSS orientations.…”

Section: Introductionmentioning

confidence: 99%

Continuous modulations of femtosecond laser-induced periodic surface structures and scanned line-widths on silicon by polarization changes

Han¹,

Jiang²,

Li³

et al. 2013

Opt. Express

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Large-area, uniform laser-induced periodic surface structures (LIPSS) are of wide potential industry applications. The continuity and processing precision of LIPSS are mainly determined by the scanning intervals of adjacent scanning lines. Therefore, continuous modulations of LIPSS and scanned line-widths within one laser scanning pass are of great significance. This study proposes that by varying the laser (800 nm, 50 fs, 1 kHz) polarization direction, LIPSS and the scanned line-widths on a silicon (111) surface can be continuously modulated with high precision. It shows that the scanned line-width reaches the maximum when the polarization direction is perpendicular to the scanning direction. As an application example, the experiments show large-area, uniform LIPSS can be fabricated by controlling the scanning intervals based on the one-pass scanned linewidths. The simulation shows that the initially formed LIPSS structures induce directional surface plasmon polaritons (SPP) scattering along the laser polarization direction, which strengthens the subsequently anisotropic LIPSS fabrication. The simulation results are in good agreement with the experiments, which both support the conclusions of continuous modulations of the LIPSS and scanned line-widths.

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Section: Introductionmentioning

confidence: 99%

Continuous modulations of femtosecond laser-induced periodic surface structures and scanned line-widths on silicon by polarization changes

Han¹,

Jiang²,

Li³

et al. 2013

Opt. Express

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“…The unique difference is that the single vector optical field in Ref. 18 is replaced by the PVOF. To generate the PVOF, the fs pulses are from a Ti:sapphire regenerative amplifier, which has a fundamental Gaussian mode, a central wavelength of 806 nm, a pulse duration of 35 fs, and a repetition rate of 1 kHz.…”

Section: Resultsmentioning

confidence: 99%

“…The axial symmetry breaking of optical field by engineering the spatial SoP structure has been demonstrated to be an extremely effective method for realizing the designable, controllable and robust field collapse and filamentation in nonlinear Kerr medium16. The vector optical fields have been confirmed to fabricate microstructures171819.…”

mentioning

confidence: 99%

Femtosecond Laser Processing by Using Patterned Vector Optical Fields

Lou

Qian

Ren

et al. 2013

Sci Rep

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We present and demonstrate an approach for femtosecond laser processing by using patterned vector optical fields (PVOFs) composed of multiple individual vector optical fields. The PVOFs can be flexibly engineered due to the diversity of individual vector optical fields in spatial arrangement and distribution of states of polarization, and it is easily created with the aid of a spatial light modulator. The focused PVOFs will certainly result in various interference patterns, which are then used to fabricate multi-microholes with various patterns on silicon. The present approach can be expanded to fabricate three-dimensional microstructures based on two-photon polymerization.

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“…Recently, vector optical fields (VOFs), as a kind of novel optical fields with space-variant distribution of states of polarization (SoPs), have attracted great attention due to their novel properties [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. The unique properties of the cylindrical VOFs (e.g., radially and azimuthally polarized ones) are to produce a far-field focal spot beyond diffraction limit [2][3][4] and to form a strong longitudinal electric component [5] under the tight focusing condition, which leads to important applications, such as high-resolution microscopy [6] and particle trapping [7].…”

Section: Introductionmentioning

confidence: 99%

Subwavelength multiple focal spots produced by tight focusing the patterned vector optical fields

Cai¹,

Tu²,

Zhang³

et al. 2013

Opt. Express

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We numerically and experimentally explored generation and regulation of subwavelength multiple focal spots produced by tight focusing patterned vector optical fields (PVOFs). We presented a modified Richard-Wolf diffraction integration method suitable for the tight focusing of the PVOFs. By tailoring the spatial geometry and the polarization distributions of the PVOFs, simulations show that the diverse spatial configurations of subwavelength multiple focal spots can be achieved. To verify our idea, we experimentally generated the theoretically calculated examples of femtosecond PVOFs, then tightly focused them on the surface of the crystalline silicon wafers, and finally characterized the morphologies of modified surfaces. The SEM (scanning electronic microscopy) images confirmed that the experimental results are in good agreement with the simulations. Based on the diverse controlling degrees of freedom of PVOFs, the resultant subwavelength focal fields are flexible and powerful in parallel processing, optical manipulation and so on.

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Two-dimensional microstructures induced by femtosecond vector light fields on silicon

Cited by 86 publications

References 30 publications

Continuous modulations of femtosecond laser-induced periodic surface structures and scanned line-widths on silicon by polarization changes

Continuous modulations of femtosecond laser-induced periodic surface structures and scanned line-widths on silicon by polarization changes

Femtosecond Laser Processing by Using Patterned Vector Optical Fields

Subwavelength multiple focal spots produced by tight focusing the patterned vector optical fields

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