2002
DOI: 10.1063/1.1433173
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Two-dimensional lateral superlattices of nanostructures: Nonlithographic formation by anodic membrane template

Abstract: A nonlithographic technique that utilizes highly ordered anodized aluminum oxide porous membrane as template is presented as a general fabrication means for the formation of an array of vastly different two-dimensional lateral superlattices structures. Hexagonal close-packed nanopore arrays were fabricated on Si, GaAs, and GaN substrates via reactive ion etching. Quantum dot arrays of various metals and semiconductors were formed through evaporation and subsequent etching. The two-dimensional lateral superlatt… Show more

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Cited by 205 publications
(145 citation statements)
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“…Recently, it has attracted great interest of preparing magnetic nanoparticles using anodized aluminum oxide (AAO) membrane as a mask [23]. [26,27], which is also consistent with theoretical calculation [28].…”
Section: Nanoparticle Made By Aao Membranesupporting
confidence: 58%
See 1 more Smart Citation
“…Recently, it has attracted great interest of preparing magnetic nanoparticles using anodized aluminum oxide (AAO) membrane as a mask [23]. [26,27], which is also consistent with theoretical calculation [28].…”
Section: Nanoparticle Made By Aao Membranesupporting
confidence: 58%
“…In this session, we will present the study of spin dynamics of two different kinds of magnetic nanoparticles. One sample was prepared by ion implantation, the other sample is prepared by anodized aluminum oxide (AAO) membrane [23] …”
Section: Magnetic Nanostructuresmentioning
confidence: 99%
“…The strong superradiance which approaches to the Dicke limit is hard to obtain in real experimental conditions where atoms are always distributed randomly. On the other hand, with the development of semiconductor quantum dots, the highly ordered arrays can be achieved in this artificial system [38,39] and its superradiance has been observed in experiment [40]. In the controllable artificial system, the cooperative effects can be studied in a regime which was difficult to achieve with real atoms [41][42][43], and our results may be valuable to its experimental research.…”
Section: Introductionmentioning
confidence: 91%
“…19,25 The free-standing AAO membrane was lifted from an aqueous solution by a C-enriched Si wafer and subsequently etched in an RIE machine. The etch recipe used is given in table 2.…”
Section: Nanopatterning Using Aaomentioning
confidence: 99%