Two-dimensional fluid modelling of charged particle transport in radio-frequency capacitively coupled discharges

Abstract

This paper reviews the formulation and updates some numerical procedures usually adopted in two-dimensional, time-dependent fluid models to study the transport of charged particles in radio-frequency capacitively coupled discharges. The description of charged particle transport is made by solving the continuity and momentum transfer equations for electrons and ions, coupled with Poisson's equation and the electron mean energy transport equations. Inertia terms are considered in the ion momentum transfer equations, by generalizing the earlier definition of effective electric field. The electron mean energy equations are written using specific energy transport parameters, deduced from integration over the electron energy distribution function (EEDF). The model adopts the local mean energy approximation, i.e. it computes the electron transport parameters as a function of the electron mean energy, using either a homogeneous, two-term Boltzmann equation solver or a Maxwellian EEDF. More appropriate boundary conditions for the electron and ion fluxes are used successfully. The model is solved for a GEC Cell reactor type (with 6.4 cm radius and 3.2 cm interelectrode distance) operating at frequency 13.56 MHz, pressures between 10 mTorr and 10 Torr and applied voltages from 100 to 500 V, in electropositive (helium) and electronegative (silane-hydrogen) gases or gas mixtures. The ion kinetics in silane and hydrogen is updated with respect to previous works, by further considering SiH + 2 , H + and H + 3 ions. In general, simulation results for some typical electrical parameters are closer to experimental measurements available than calculations reported in previous works.

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