1999
DOI: 10.1063/1.369664
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Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures

Abstract: Carrier concentration profiles of two-dimensional electron gases are investigated in wurtzite, Ga-face Al x Ga 1Ϫx N/GaN/Al x Ga 1Ϫx N and N-face GaN/Al x Ga 1Ϫx N/GaN heterostructures used for the fabrication of field effect transistors. Analysis of the measured electron distributions in heterostructures with AlGaN barrier layers of different Al concentrations (0.15ϽxϽ0.5) and thickness between 20 and 65 nm demonstrate the important role of spontaneous and piezoelectric polarization on the carrier confinement… Show more

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Cited by 2,621 publications
(1,424 citation statements)
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References 61 publications
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“…This formation mechanism of 2DEG has been already verified in AlGaN/GaN. 16 We further inference the electrons accumulated in potential will form a 2-D electron gas (2DEG). These electrons will increase mobility in comparison to p-n junctions without ADB structure.…”
Section: Methodsmentioning
confidence: 96%
“…This formation mechanism of 2DEG has been already verified in AlGaN/GaN. 16 We further inference the electrons accumulated in potential will form a 2-D electron gas (2DEG). These electrons will increase mobility in comparison to p-n junctions without ADB structure.…”
Section: Methodsmentioning
confidence: 96%
“…For a fully strained AlGaN layer with an Al mole fraction of 30%, a piezoelectrically induced sheet charge of above 10 13 /cm 2 is expected [3]. The discrepancy between the measured and the expected carrier concentration may arise from relaxation of the Al 0.3 GaN layer or from trapping effects.…”
Section: Device Fabricationmentioning
confidence: 99%
“…Hence, such polarization-induced doping can also compensate for the intrinsic potential drop. 33 In our study, the formation of depletion and inversion regions in the conduction band is the sole mechanism responsible for securing equilibrium. Figure 1 illustrates the formation of depletion and inversion regions for an unbiased double-barrier structure, with AlN barriers, and GaN well and cladding layers.…”
Section: A Depletion and Inversion Regionsmentioning
confidence: 99%