2010
DOI: 10.1063/1.3489101
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Two-dimensional electron gas in Zn-polar ZnMgO/ZnO heterostructure grown by metal-organic vapor phase epitaxy

Abstract: We report the formation of two-dimensional electron gas ͑2DEG͒ at the Zn 1−x Mg x O / ZnO interface grown by metal-organic vapor phase epitaxy on sapphire substrates. The existence of the 2DEG is confirmed by the observation of Shubnikov-de Haas oscillations and the integer quantum Hall effect. In particular, the Zn 0.8 Mg 0.2 O / ZnO heterostructure shows a high Hall mobility of 2138 cm 2 / V s with a carrier sheet density of 3.51ϫ 10 12 cm −2 at 1.4 K. We attribute the origin of 2DEG to be the donor states o… Show more

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Cited by 71 publications
(42 citation statements)
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“…[2][3][4][5][6][7][8][9] Similar to the AlGaN/GaN hetero structure, 10 very high electron concentrations (% 10 12 cm À2 to 10 13 cm À2 ) are obtained as a result of polarization effects and a large conduction band offset for the ZnMgO/ZnO hetero interface, even in the absence of any intentional impurity doping. [11][12][13][14][15][16][17] Crucial aspects of improving the efficiency of ZnO-based devices is their electron mobility and the transport properties of the two-dimensional electron gas (2DEG).…”
Section: Introductionmentioning
confidence: 93%
“…[2][3][4][5][6][7][8][9] Similar to the AlGaN/GaN hetero structure, 10 very high electron concentrations (% 10 12 cm À2 to 10 13 cm À2 ) are obtained as a result of polarization effects and a large conduction band offset for the ZnMgO/ZnO hetero interface, even in the absence of any intentional impurity doping. [11][12][13][14][15][16][17] Crucial aspects of improving the efficiency of ZnO-based devices is their electron mobility and the transport properties of the two-dimensional electron gas (2DEG).…”
Section: Introductionmentioning
confidence: 93%
“…This can be achieved by intentional variation of the fluxes/partial pressures during growth in molecular beam epitaxy (MBE) or the variation of precursor fluxes in metal‐organic vapor phase epitaxy (MOVPE). For MBE and MOVPE (unintentional) vertical composition gradients have been reported for (Mg,Zn)O due to the “composition‐pulling effect.” Also for pulsed laser deposition, a scheme has been developed to fabricate vertically composition graded layers using radially segmented targets …”
Section: New Concept For a Monolithic Wavemetermentioning
confidence: 99%
“…However, recent calculations show that oxygen vacancies are actually a deep-level donor ͑0.7 eV below the conduction band minimum͒, 19,20 leading to an ultralow activation rate of free electrons at room temperature. This could be ascribed to the poor crystal quality and the relatively small domains.…”
Section: B Electrical Propertiesmentioning
confidence: 99%