2023
DOI: 10.1021/acsaelm.2c01435
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Two-Dimensional Dielectrics for Future Electronics: Hexagonal Boron Nitride, Oxyhalides, Transition-Metal Nitride Halides, and Beyond

Abstract: Recent developments in the field of two-dimensional (2D) van der Waals (vdW) dielectrics have captured great interest because of potential applications of 2D materials in future generations of complementary metal-oxide semiconductor (CMOS) technologies. In this Spotlight article, we highlight the progress we recently made toward the discovery of 2D vdW dielectrics, which will be critical to realizing a vdW transistor technology. We provide an overview of how to calculate the dielectric properties of 2D vdW die… Show more

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Cited by 14 publications
(7 citation statements)
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“…Here, we assess if any of the sub‐nm EOT candidates can outperform hBN under the same set‐up, which requires a leakage currents below 0.01 A cm −2 for gate voltages | V G | â©œ 0.7 V. [ 75 ] We estimate the leakage currents based on the Tsu–Esaki formalism [ 80 ] implemented in Comphy, [ 81,82 ] though we note that other tunneling equations, such as the Fowler–Nordheim [ 83 ] and Richardson–Dushmann [ 84,85 ] laws, can also be used for the modelling of gate leakage current. [ 36,63,76,77 ]…”
Section: Resultsmentioning
confidence: 99%
See 2 more Smart Citations
“…Here, we assess if any of the sub‐nm EOT candidates can outperform hBN under the same set‐up, which requires a leakage currents below 0.01 A cm −2 for gate voltages | V G | â©œ 0.7 V. [ 75 ] We estimate the leakage currents based on the Tsu–Esaki formalism [ 80 ] implemented in Comphy, [ 81,82 ] though we note that other tunneling equations, such as the Fowler–Nordheim [ 83 ] and Richardson–Dushmann [ 84,85 ] laws, can also be used for the modelling of gate leakage current. [ 36,63,76,77 ]…”
Section: Resultsmentioning
confidence: 99%
“…[73] Although few-layer hBN is regarded as a promising ultrathin vdW gate dielectric for transistor miniaturization, sub-nm equivalent oxide thickness (EOT) hBN exhibits unacceptably high leakage currents. [72,74,75] The search for performant layered dielectrics [36,63,76,77] is, however, a challenging quest due to the simultaneous requirements of high 𝜅, low interfacial defects, high breakdown strength [78] and an appropriate band alignment with the channel semiconductor. [79] Based on the EOT and leakage current requirements, prospective gate dielectrics are identified from the UWBG candidates as follows.…”
Section: High-𝜿 Gate Dielectricsmentioning
confidence: 99%
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“…Recent theoretical calculations of other 2D insulating materials identified a number of potential dielectrics (5,6). Of these, a class of nitride chlorides, oxychlorides, and hydroxide compounds were identified with a range of properties.…”
Section: Introductionmentioning
confidence: 99%
“…Theoretically, the size-induced dielectric constant reduction is presently explained from the perspective of quantum confinement [12], bond theory [22], and thermodynamics [11]. Numerous calculation methods have been developed to analyze the size-dependent dielectric constant of TMDs, including the density functional theory [4,[23][24][25][26][27], full potential linearized augmented plane wave method [7,28], ab initio calculations [8,29], and quasiparticle self-consistent calculations [30]. For the mechanical strain-induced dielectric constant rising in TMDs system, it is presently investigated by mainly using density functional theory [31][32][33][34][35][36].…”
Section: Introductionmentioning
confidence: 99%