2006
DOI: 10.1016/j.mee.2006.01.263
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Twin cantilevers with a nanogap for single molecule experimentation

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Cited by 9 publications
(10 citation statements)
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“…where C 1 , C 2 , C 3 can be determined from (16). Putting the expressions of C z from ( 16) and ( 17) in (15) C ox for different patterns can be obtained.…”
Section: Concave and Convex Patternsmentioning
confidence: 99%
“…where C 1 , C 2 , C 3 can be determined from (16). Putting the expressions of C z from ( 16) and ( 17) in (15) C ox for different patterns can be obtained.…”
Section: Concave and Convex Patternsmentioning
confidence: 99%
“…Hence, accurate methods to test and evaluate the mechanical properties is a very important aspect. Several methods are proposed for finding the mechanical properties e.g., Young's modulus, Poisson's ratio [5,[14][15][16][17]. Static analyses of 2-2 multi-layered piezoelecttric curved composites is discussed in [18,19] v. Subrahmanyam [14] proposed a method of evaluating the Young's modulus of different micro-machined structures such as polysilicon and fJ-SiC cantilever beams.…”
Section: Materials and Manufacturing Aspecfsmentioning
confidence: 99%
“…Literature seems to suggest that the elastic behavior and thus elastic constants of thin films can differ significantly from their bulk counterparts (see for example [16] and references therein). The reason attributed was that the specific microstructure such as texture, defects, interface mixing and size effects come into play.…”
Section: Materials and Manufacturing Aspecfsmentioning
confidence: 99%
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“…In this type of biosensor devices, formation of a nanogap involves a thin film deposition and subsequent wet etching processes. This reduces the complications in lithographic process associated with the planar nanogap FETs [13][14][15][16][17]. As sensitivity is the prime concern of biosensors, search for highly sensitive biosensor is still in progress.…”
Section: Introductionmentioning
confidence: 99%