Turner, C(laude) A(llen) P(orter)

Growth and characterization of AlGaN/GaN HEMT heterostructures on 100-mm Si (111) by MBE

“…The basic principle of AFM is that the probe is maintained close to the surface and is maintained through a feedback mechanism as the scan continues. Also, this feedback helps in maintaining the probe at a constant distance from the sample to obtain sample topography [184]. The tip is brought closer to the surface for topographical imaging.…”

“…However, the attractive force, coupled with the electrostatic force, create substantial frictional forces, which might lead to sample damage. Contact mode is often called the static mode[184].…”