MOEMS and Miniaturized Systems XVIII 2019
DOI: 10.1117/12.2509825
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Tuning of 2D rod-type photonic crystal cavity for optical modulation and impact sensing

Abstract: We propose a novel way of mechanical perturbation of photonic crystal cavities for on-chip applications. We utilize the equivalence of the 2D photonic crystals with perfect electric conductor (PEC) boundary conditions to the infinite height 3D counterparts for rod type photonic crystals. Designed structures are sandwiched with PEC boundaries above and below and the perturbation of the cavity structures is demonstrated by changing the height of PEC boundary. Once a defect filled with air is introduced, the meta… Show more

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Cited by 2 publications
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