2017
DOI: 10.1088/1402-4896/aa89c1
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Tungsten oxide thin film bombarded with a low energy He ion beam: evidence for a reduced erosion and W enrichment

Abstract: Nanocrystalline tungsten oxide (WO 3) thin films synthesized by thermal oxidation of tungsten substrates were exposed to low energy helium ions (energy: 80 eV; flux: 1.4-1.7×10 20 m-2 s-1) at room temperature and at 673 K. The structure and morphology changes of the oxide were studied using Raman spectroscopy and electron microscopy. Due to the low ion energy, no erosion is observed at room temperature. On the contrary, at 673 K, a colour change is observed and a significant erosion is measured (~ 70 nm for a … Show more

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Cited by 9 publications
(19 citation statements)
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“…The W-N bonds could be related to the very weak signal around 400 cm -1 . The spectrum from the cWON (37,16) sample is totally flat in the same spectral region. In this case, the absence of bands whereas W-N bonds are present in cWON (37,16) can be due to some quantum-selection rules related to the structure during the Raman scattering process, whereas the presence of defects (like oxygen and nitrogen, grain boundaries due to small crystallite size,…) can break the related quantum selection rules, leading to the presence of these bands.…”
Section: Porousmentioning
confidence: 91%
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“…The W-N bonds could be related to the very weak signal around 400 cm -1 . The spectrum from the cWON (37,16) sample is totally flat in the same spectral region. In this case, the absence of bands whereas W-N bonds are present in cWON (37,16) can be due to some quantum-selection rules related to the structure during the Raman scattering process, whereas the presence of defects (like oxygen and nitrogen, grain boundaries due to small crystallite size,…) can break the related quantum selection rules, leading to the presence of these bands.…”
Section: Porousmentioning
confidence: 91%
“…The spectrum from the cWON (37,16) sample is totally flat in the same spectral region. In this case, the absence of bands whereas W-N bonds are present in cWON (37,16) can be due to some quantum-selection rules related to the structure during the Raman scattering process, whereas the presence of defects (like oxygen and nitrogen, grain boundaries due to small crystallite size,…) can break the related quantum selection rules, leading to the presence of these bands. The lack of signal intensity corresponding to W-O bonds is different here, possibly due to the stability of the W-N bonds that hinder the formation of W-O bonds during the deposition process of the film.…”
Section: Porousmentioning
confidence: 91%
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“…According to the literature, the other four peaks represented W 5+ 4f 7/2 (34.7 eV), W 5+ 4f 5/2 (36.8 eV), W 6+ 4f 7/2 (35.9 eV), and W 6+ 4f 5/2 (38.0 eV), resulting from WO 2.72 (surface oxidation). Moreover, the two peaks at lower energies (31.6 and 33.7 eV) were assigned to metallic W 4f 7/2 and W 4f 5/2 , respectively [40–42] . Compared with Ni 2+ , the binding energy shift W ions is insignificant and can be ignored.…”
Section: Resultsmentioning
confidence: 99%