Tunable piezoelectric MEMS resonators for real-time clock

Serrano, Diego; Tabrizian, Roozbeh; Ayazi, Farrokh

doi:10.1109/fcs.2011.5977885

Cited by 28 publications

(17 citation statements)

References 10 publications

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“…The size comparison illustrated in Table II references all MEMS-die footprints to the package size of the smallest [14], where the larger the scale factor, the smaller the die footprint. From Table II, it can be seen that the oscillator of this work is 181× smaller than its quartz-crystal counterpart and significantly smaller than previously demonstrated MEMS approaches [5] [6]. The device of this work also offers a considerably larger tuning range than the recently demonstrated piezoelectric based approach [6], and consumes less power than the smallest commercially available 32-kHz quartzbased product.…”

Section: Resultsmentioning

confidence: 76%

“…From Table II, it can be seen that the oscillator of this work is 181× smaller than its quartz-crystal counterpart and significantly smaller than previously demonstrated MEMS approaches [5] [6]. The device of this work also offers a considerably larger tuning range than the recently demonstrated piezoelectric based approach [6], and consumes less power than the smallest commercially available 32-kHz quartzbased product. Given the favorable scaling attributes for capacitive-transduced resonators, highlighted in Section II, even more reductions in size and power consumption should be possible as better lithography becomes available.…”

Section: Resultsmentioning

confidence: 76%

“…These diminutive features com- bine to deliver a compact device footprint measuring just 110μm×140μm, or 0.0154mm 2 . This compact area is more than 100× smaller than the smallest packaged commercial quartz clock-resonator [1] and at least 4× smaller than the smallest previously demonstrated MEMS-based research resonator [6].…”

Section: Resonator Fabricationmentioning

confidence: 99%

“…While 32.769-kHz MEMS-based resonators have recently been released that are 10× smaller than quartz counterparts [4], the potential for even smaller devices remains. Pursuant to exploring just how small a MEMS-based real-time clock resonator might practically become via sheer scaling, this work uses aggressive lithography to realize a capacitive-comb transduced folded-beam micromechanical resonator that occupies only 0.0154mm 2 of die area, which is more than 100× smaller by area than miniaturized quartz crystal implementations [1] and at least 4× smaller than other MEMS-based approaches, including those using piezoelectric material [5] [6]. The combination of this tiny resonator together with a CMOS sustaining amplifier operating in weak inversion provides sustained oscillation with just 2.1µW of DC power consumption and further offers opportunities for significant reductions in power consumption via scaling.…”

mentioning

confidence: 99%

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A real-time 32.768-kHz clock oscillator using a 0.0154-mm<sup>2</sup> micromechanical resonator frequency-setting element

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Naing

Schneider

et al. 2012

2012 IEEE International Frequency Control Symposium Proceedings

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A capacitive-comb transduced micromechanical resonator using aggressive lithography to occupy only 0.0154-mm 2 of die area has been combined via bond-wiring with a custom ASIC sustaining amplifier and a supply voltage of only 1.65V to realize a 32.768-kHz real-time clock oscillator more than 100× smaller by area than miniaturized quartz crystal implementations and at least 4× smaller than other MEMSbased approaches, including those using piezoelectric material.The key to achieving such large reductions in size is the enormous rate at which scaling improves the performance of capacitive-comb transduced folded-beam micromechanical resonators, for which scaling of lateral dimensions by a factor S provides an S 2 × reduction in both motional resistance and footprint for a given resonance frequency. This is a very strong dependency that raises eyebrows, since the size of the frequency-setting tank element may soon become the most important attribute governing cost in a potential MEMS-based or otherwise batch-fabricated 32.768-kHz timing oscillator market. In addition, unlike quartz counterparts, the size reduction demonstrated here actually reduces power consumption, allowing this oscillator to operate with only 2.1μW of DC power.

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Section: Resultsmentioning

confidence: 76%

Section: Resultsmentioning

confidence: 76%

Section: Resonator Fabricationmentioning

confidence: 99%

mentioning

confidence: 99%

See 2 more Smart Citations

A real-time 32.768-kHz clock oscillator using a 0.0154-mm<sup>2</sup> micromechanical resonator frequency-setting element

Barrow

Naing

Schneider

et al. 2012

2012 IEEE International Frequency Control Symposium Proceedings

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show abstract

“…Since then, much effort has been invested to optimize fabrication processes and system architecture [3], which made electromechanical resonators practical. Micro resonators are at the heart of many system applications as sensors [4], signal processing [5], frequency references and clocks [6,7], and many more.…”

Section: Introductionmentioning

confidence: 99%

Measures of quality-factor in gap-closing electrostatic resonators

Shmulevich

Lerman

Elata

2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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We present analytic expressions and experimental verification for common measures of quality-factor in gap-closing electrostatic resonators. We show that peak-gain, peak-sharpness and logarithmic decrement are distinctively different and are not equal to the quality-factor of the system. The significance of this work is that it clarifies the correct way in which the performance of MEMS resonators should be reported to avoid ambiguity.

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