Tunable optical properties of uniform and nanostructured TiN thin films

Jen, Yi‐Jun; Lin, Meng‐Ju; Li, Ming-Zheng; Cong, Ming-Yang

doi:10.1117/12.2535680

Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI 2019

DOI: 10.1117/12.2535680

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Tunable optical properties of uniform and nanostructured TiN thin films

Yi‐Jun Jen

Meng‐Ju Lin

Ming-Zheng Li

et al.

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Tunable optical properties of uniform and nanostructured TiN thin films

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References 11 publications

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