Tunable optical filter of porous silicon as key component for a MEMS spectrometer

Lammel, Gerhard; Schweizer, Sandra; Schiesser, S.; Renaud, Philippe

doi:10.1109/jmems.2002.803278

Cited by 76 publications

(34 citation statements)

References 25 publications

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“…Previous attempts to build a NDIR micro spectrometer by the use of MEMS structures have been done only recently [2]. Other proposal is based on the use of a Fabry Perot micro spectrometer built using surface micro-machined polysilicon mirrors that are actuated electro statically [3,4].…”

Section: Introductionmentioning

confidence: 99%

Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters

Rubio

Santander

Fonollosa

et al. 2006

Sensors and Actuators B: Chemical

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Section: Introductionmentioning

confidence: 99%

Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters

Rubio

Santander

Fonollosa

et al. 2006

Sensors and Actuators B: Chemical

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“…Tunable optical filters are a key component in the interrogation of optical sensors [33], in spectroscopy [34], as well as in video distribution networks [35]. A variety of bandpass tunable filters have been demonstrated in the past decades.…”

Section: Thermally Tunable Extrinsic Fabry-perot Filtermentioning

confidence: 99%

Optical Fiber High Temperature Sensor Instrumentation for Energy Intensive Industries

Cooper¹,

Wang²,

Pickrell³

2006

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Executive SummaryThis report summarizes technical progress during the program "Optical Fiber High Temperature Sensor Instrumentation for Energy Intensive Industries", performed by the Center for Photonics Technology of the Bradley Department of Electrical and Computer Engineering at Virginia Tech. The objective of this program was to use technology recently invented at Virginia Tech to develop and demonstrate the application of self-calibrating optical fiber temperature and pressure sensors to several key energy-intensive industries where conventional, commercially available sensors exhibit greatly abbreviated lifetimes due primarily to environmental degradation.A number of significant technologies were developed under this program, including• a laser bonded silica high temperature fiber sensor with a high temperature capability up to 700°C and a frequency response up to 150 kHz,• the world's smallest fiber Fabry-Perot high temperature pressure sensor (125 x 20 μm) with 700°C capability,• UV-induced intrinsic Fabry-Perot interferometric sensors for distributed measurement,• a single crystal sapphire fiber-based sensor with a temperature capability up to 1600°C.These technologies have been well demonstrated and laboratory tested. Our work plan included conducting major field tests of these technologies at EPRI, Corning, Pratt & Whitney, and Global Energy; field validation of the technology is critical to ensuring its usefulness to U.S. industries. Unfortunately, due to budget cuts, DOE was unable to follow through with its funding commitment to support Energy Efficiency Science Initiative projects and this final phase was eliminated. Accomplishments during the program are summarized briefly here and described in detail in the remainder of the report.→ A cleanroom facility was designed and installed at the Center for Photonics Technology for the fabrication of diaphragm-based Fabry-Perot sensors.→ Sensor testing methods have been developed and effectively utilized to analyze various aspects of sensor performance. A high temperature, high pressure dynamic test system was designed and assembled to allow sensor evaluation at temperature up to 1200 °C, background pressure up to 200 psi, and dynamic pressure more than 140 dB with a frequency of 47 kHz → Borosilicate ring-based engine sensors were designed and fabricated, and their performance characteristics evaluated.→ Photolithography procedures were optimized for etched diaphragm-based sensor fabrication.→ Direct bonding, hydroxide catalysis bonding, and sol-gel-based bonding techniques were investigated for diaphragm/ferrule bonding requirements. Optical Fiber Sensors for Energy Intensive Industries iv→ Laser bonding-based pressure sensors were successfully demonstrated up to 1800 psi.→ A novel demodulation technique was developed, called grating-assisted operating point tuning (GA-OPT), by using a diffraction grating with feedback control. The GA-OPT features dynamic operating-point control, high frequency response, insensitivity to light source fluctuation, and r...

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“…The complete devices are around 10 cm×20 cm in size, and use in-plane electrostatic combs which are vacuumpackaged. Work from Lammel et al, is focusing on the development of a microspectrometer based on a tunable interference filter for infrared or visible light which is fabricated by a new porous silicon technology [25]. Two thermal bimorph micro-actuators tilt this plate by up to 90 o .…”

Section: Introductionmentioning

confidence: 99%

Precision alignment and assembly of a Fourier transform microspectrometer

Das

Popa

Sin

et al. 2009

J. Micro-Nano Mech.

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Integrating optics with MEMS presents numerous challenges in assembly and joining of heterogeneous components, stringent alignment of parts, packaging of the device to protect it, etc. Microspectrometers are examples of MOEMS devices where these issues play a significant role to the performance of the device. The motivation behind miniaturization of the spectrometer is strong, because traditional spectrometers are table-top instruments, and they are generally too large, and too costly to be ported outside of lab environments. Micro-Electro-MechanicalSystems (MEMS) technology combined with microassembly offers promising possibilities to achieve compact and cost-effective miniaturization in such instruments. In this paper, we present a fiber-coupled Fourier-Transform microspectrometer with a nominal size of 3cmx3cmx3cm, constructed using 3D hybrid microassembly and targeting wavelengths in the visible and NIR spectra. We use modular micro scale parts, including minimum energy compliant MEMS fasteners to configure a die-sized microoptical bench. Light coupling, miniature electronics and power are included in a spectrometer package. In order to achieve the required precision on the microoptical bench we employ automated assembly of microcomponents. We present a systematic twostep assembly & alignment scheme (coarse and fine) using an image-based spot Jacobian algorithm. In this paper we present details related to design, tolerance analysis, calibration, microassembly and visual servoing techniques as well as spectrum data recovery for a completed prototype.

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Tunable optical filter of porous silicon as key component for a MEMS spectrometer

Cited by 76 publications

References 25 publications

Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters

Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters

Optical Fiber High Temperature Sensor Instrumentation for Energy Intensive Industries

Precision alignment and assembly of a Fourier transform microspectrometer

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