2007
DOI: 10.1117/12.721985
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Tunable one-dimensional photonic crystal slabs

Abstract: A 1D photonic crystal slab based on preferential etching of commercially available silicon-on-insulator wafers is presented. Compared to dry etching, anisotropic wet etching is more tolerant to errors as it is self-stopping on crystallographic {111} planes and it produces a more precise geometry with symmetries and homothetic properties, with surface roughness close to 1 nm. The resulting grooves are infiltrated by low viscosity liquid crystal having large positive optical anisotropy. The use of slanted groove… Show more

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Cited by 2 publications
(2 citation statements)
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“…As the LC permittivity varies in a wide range (from 7 to 20 for the LC E7), neglecting this coupling mechanism results in a significant overestimate of the reorientations [29,32]. First, the local electric field reorienting the LC molecules varies from point to point while reorientation occurs.…”
Section: Electro-optical Designmentioning
confidence: 99%
“…As the LC permittivity varies in a wide range (from 7 to 20 for the LC E7), neglecting this coupling mechanism results in a significant overestimate of the reorientations [29,32]. First, the local electric field reorienting the LC molecules varies from point to point while reorientation occurs.…”
Section: Electro-optical Designmentioning
confidence: 99%
“…The bottom and top bases equal to 370 nm and 50 nm, respectively, producing a structure with a photonic crystal period of D = 420 nm. The grooves are etched by anisotropic preferential etching, using an alkaline solution as reported in [18,19]. The refractive indices of Si and SiO 2 for the wavelengths here studied (1.3 µm < λ < 2.3 µm) are considered to be 3.5 and 1.45, respectively.…”
Section: Description Of the Structurementioning
confidence: 99%