2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) 2015
DOI: 10.1109/transducers.2015.7181358
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Tunable multisegment SixNy/AlN piezo lenses for wavefront correction

Verena Zuerbig
1
,
Daniel Pätz
2
,
Jiří Fries
3
et al.
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