Tunable mid-wave infrared Fabry-Perot bandpass filters using phase-change GeSbTe

Williams, Calum; Hong, Nina; Julian, Matthew; Borg, Stephen E.; Kim, Hyun Jung

doi:10.1364/oe.390538

Cited by 59 publications

(51 citation statements)

References 41 publications

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“…Note that there also other options for MEMS tunable filters based on the thickness actuation of solid components of the filter [ 57 ]. However, this review focuses on the thickness actuation of an airgap cavity.…”

Section: Fabrication and Characterization Of Mems Tunable Fp Filtementioning

confidence: 99%

“…The third interferometric spectrometer is based on the Fabry–Pérot (FP) principle [ 4 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 ]. Although only two parallel transparent dielectric mirrors are involved, the FP interferometer is also highly complex and involves multipath interference.…”

Section: Introductionmentioning

confidence: 99%

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Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

et al. 2021

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Optical spectrometers and sensors have gained enormous importance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry–Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters. The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.

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Section: Fabrication and Characterization Of Mems Tunable Fp Filtementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

et al. 2021

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“…This concept was pursued by integrating a subwavelength optical cavity, which incorporated two separated layers of GeTe, with a joule heater element to produce a tunable micro-display rendering four different colors [171]. Also, more recently multispectral thermal imaging and gas sensing have been demonstrated in the mid-wave IR range by tuning the GST spacer between two cascaded Ge:Si distributed Bragg reflectors [172].…”

Section: Hybrid Dielectric/pcm Metasurfaces For Global Amplitude Controlmentioning

confidence: 99%

Tunable nanophotonics enabled by chalcogenide phase-change materials

et al. 2020

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AbstractNanophotonics has garnered intensive attention due to its unique capabilities in molding the flow of light in the subwavelength regime. Metasurfaces (MSs) and photonic integrated circuits (PICs) enable the realization of mass-producible, cost-effective, and efficient flat optical components for imaging, sensing, and communications. In order to enable nanophotonics with multipurpose functionalities, chalcogenide phase-change materials (PCMs) have been introduced as a promising platform for tunable and reconfigurable nanophotonic frameworks. Integration of non-volatile chalcogenide PCMs with unique properties such as drastic optical contrasts, fast switching speeds, and long-term stability grants substantial reconfiguration to the more conventional static nanophotonic platforms. In this review, we discuss state-of-the-art developments as well as emerging trends in tunable MSs and PICs using chalcogenide PCMs. We outline the unique material properties, structural transformation, and thermo-optic effects of well-established classes of chalcogenide PCMs. The emerging deep learning-based approaches for the optimization of reconfigurable MSs and the analysis of light-matter interactions are also discussed. The review is concluded by discussing existing challenges in the realization of adjustable nanophotonics and a perspective on the possible developments in this promising area.

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“…Ding et al [ 17 ] also proposed tunable bandstop mid-infrared filters based on Ge

metasurface composed of nanorods. In order to achieve bandpass filters, Zhou et al [ 18 ] and Williams et al [ 19 ] respectively proposed or demonstrated tunable mid-infrared bandpass filters by embedding a Ge

film in a Fabry-Pérot cavity. Although the quality factor, defined as the ratio of the linewidth to the central wavelength, can reach 70–90, the spectral tunability is very limited (only ∼420 nm in [ 18 ] or ∼300 nm in [ 19 ]).…”

Section: Introductionmentioning

confidence: 99%

Nonvolatile, Reconfigurable and Narrowband Mid-Infrared Filter Based on Surface Lattice Resonance in Phase-Change Ge2Sb2Te5

et al. 2020

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We propose a nonvolatile, reconfigurable, and narrowband mid-infrared bandpass filter based on surface lattice resonance in phase-change material Ge2Sb2Te5. The proposed filter is composed of a two-dimensional gold nanorod array embedded in a thick Ge2Sb2Te5 film. Results show that when Ge2Sb2Te5 transits from the amorphous state to the crystalline state, the narrowband reflection spectrum of the proposed filter is tuned from 3.197 μm to 4.795 μm, covering the majority of the mid-infrared regime, the peak reflectance decreases from 72.6% to 25.8%, and the corresponding quality factor decreases from 19.6 to 10.3. We show that the spectral tuning range can be adjusted by varying the incidence angle or the lattice period. By properly designing the gold nanorod sizes, we also show that the quality factor can be greatly increased to 70 at the cost of relatively smaller peak reflection efficiencies, and that the peak reflection efficiency can be further increased to 80% at the cost of relatively smaller quality factors. We expect that this work will advance the engineering of Ge2Sb2Te5-based nonvalatile tunable surface lattice resonances and will promote their applications especially in reconfigurable narrowband filters.

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Tunable mid-wave infrared Fabry-Perot bandpass filters using phase-change GeSbTe

Cited by 59 publications

References 41 publications

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

Tunable nanophotonics enabled by chalcogenide phase-change materials

Nonvolatile, Reconfigurable and Narrowband Mid-Infrared Filter Based on Surface Lattice Resonance in Phase-Change Ge2Sb2Te5

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